LiNi0.5Co0.2Mn0.3O2陶瓷靶材制备性能研究  

Preparation and properties of LiNi_(0.5)Co_(0.2)Mn_(0.3)O_2 ceramic target

作　　者：刘欢 赵江涛 沈金城 董磊 王晨 姚蕾 杨海涛[1] LIU Huan;ZHAO Jiangtao;SHEN Jincheng;DONG Lei;WANG Chen;YAO Lei;YANG Haitao(Shenzhen Engineering Laboratory of Advanced Technology for Ceramics,Guangdong Engineering Research Center of Functional Material Interface,Key Laboratory of Functional Materials of Shenzhen,College of Materials Science and Engineering,Shenzhen University,Shenzhen 518060,China)

机构地区：[1]深圳大学材料学院,深圳市特种功能材料重点实验室,深圳陶瓷制备先进技术工程实验室,广东省功能材料界面工程技术研究中心,广东深圳518060

出　　处：《功能材料》2018年第10期190-193,198,共5页Journal of Functional Materials

基　　金：深圳市基础研究资助项目(JCYJ20160422144751573,JCYJ20160422104921235,JCYJ20140418181958489)。

摘　　要：采用传统的常压固相烧结的方法制备了LiNi_(0.5)Co_(0.2)Mn_(0.3)O_2陶瓷靶材。研究了不同烧结温度对于LiNi_(0.5)Co_(0.2)Mn_(0.3)O_2(NCM,523)陶瓷靶断面形貌、物相及晶型结构、相对密度和抗弯强度的影响。通过对NCM陶瓷靶材进行分析表征,研究结果表明,在烧结温度为1 100℃时,靶材具有最优的各项性能,其相对密度为98.8%,抗弯强度为65.7MPa,其各项力学性能均已经到达射频磁控溅射镀膜机所需性能,适合于工业化生产。LiNi 0.5 Co 0.2 Mn 0.3 O 2 ceramic target was prepared by the conventional atmospheric solid-phase sintering method.The effects of the sintering temperature on the phase and crystal structure,relative density and bending strength of LiNi 0.5 Co 0.2 Mn 0.3 O 2(NCM,523)ceramic target were investigated.The analysis result of the NCM ceramic target indicated that the ceramic target has the best properties when it is sintered at 1 100℃.The relative density is 98.8%,and the bending strength reaches 65.7 MPa.In this case,its mechanical properties can meet the requirement for the target of a RF magnetron sputtering application and its fabrication process can be scaled up.

关 键 词：靶材 射频磁控溅射 三元正极材料 烧结温度 

分 类 号：TF125[冶金工程—粉末冶金] TM283[冶金工程—冶金物理化学]