基于可靠度仿真的MEMS加速度开关结构优化  

Structure Optimization of MEMS Acceleration Switch Based on Reliability Simulation

作　　者：丁丽梅 李世中[1] 段荣杰 DING Limei;LI Shizhong;DUAN Rongjie(College of Mechatronic Engineering,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学机电工程学院,山西太原030051

出　　处：《机械与电子》2018年第11期34-37,共4页Machinery & Electronics

摘　　要：基于MEMS加速度开关的结构与作用原理,利用ANSYS对悬臂梁进行有限元分析,获得在冲击载荷作用下悬臂梁的受力情况以及位移的大小;采用蒙特卡罗方法产生伪随机数,模拟不同样本变量的随机分布情况,以解决试验样本不足的问题,对MEMS加速度开关的可靠度进行了分析计算;采取改进结构以优化设计,降低开关的潜在危险和失效概率,提升可靠度。Based on the structure and action principle of the MEMS acceleration switch,the finite element analysis of the cantilever beam was conducted by ANSYS.The force condition and the displacement of the cantilever beam under the impact load were obtained.The Monte Carlo method was used to produce the pseudo random number to simulate the random distribution of the different sample variables so as to solve the problem of insufficient test samples.The reliability of the MEMS acceleration switch was analyzed and calculated.The improved structure was adopted to optimize the design,reduce the potential danger and failure probability of the switch,and improve the reliability.

关 键 词：MEMS加速度开关 可靠度仿真 有限元分析 结构优化 

分 类 号：TN303[电子电信—物理电子学]