CVD-ZnS胞状生长现象抑制方法  

Counteracting methods of nodular growth in CVD-ZnS

作　　者：杨德雨 杨海[1] 李红卫[2] 霍承松[1] 魏乃光[1] 黎建明[1] 李冬旭 史晶晶 Yang Deyu;Yang Hai;Li Hongwei;Huo Chengsong;Wei Naiguang;Li Jianming;Li Dongxu;Shi Jingjing(GRIREM Guojing Advanced Material Co.,Ltd.,General Research Institute for Nonferrous Metals,Sanhe 065201,China;GRIREM Advanced Materials Co.,Ltd.,General Research Institute for Nonferrous Metals,Beijing 100088,China)

机构地区：[1]北京有色金属研究总院有研国晶辉新材料有限公司,河北三河065201 [2]北京有色金属研究总院有研新材料有限公司,北京100088

出　　处：《红外与激光工程》2018年第11期351-356,共6页Infrared and Laser Engineering

摘　　要：实验采用化学气相沉积方法制备硫化锌体材料(CVD-ZnS),并对材料中普遍出现的胞状生长现象进行了系统研究。通过微观结构表征及宏观形貌分析,发现胞状生长起始于大尺寸的晶体生长中心,其内部晶粒的生长方向发生了横向偏移,且生长速率大于正常晶粒,最终导致了产物表面的球状凸起,产物侧剖面表现出"倒圆锥"状生长形貌。同时,依据实验中所出现的不同胞状生长现象,探究了胞状物异常生长中心形成的主要原因。在此基础之上,设计了不同条件的沉积实验,探究了各类胞状生长现象的抑制方法,并在实际生产过程中得到了验证,从而实现了对该异常现象的有效抑制。Chemical vapor deposition method was used to manufacture bulk ZnS materials(CVD-ZnS).Nodular growth phenomenon in bulk CVD-ZnS was studied systematically.Through the analysis of microstructure and macrostructure,some growth centers with larger size were seen as the origin of nodular cells.Growth direction of nodular cells was changed to cross direction,while growth rate of nodular cells was faster than other normal grains.All of these factors led to the spherical objects on the surface of products.A turbinate structure was observed from nodular cell in cut-plane samples as well.Meanwhile,according to the different nodular phenomena,the main mechanisms of different growth centers were discussed.The counteracting methods,based on above conclusions,were explored and confirmed through different deposited experiments.Thus,the nodular growth in CVD-ZnS could be restrained effectively.

关 键 词：CVD-ZnS 胞状生长 抑制方法 微观结构 

分 类 号：TN213[电子电信—物理电子学]