栅式变面积电涡流位移传感器阻抗桥测量系统  

Impedance Bridge Measuring System of Grating Type Area-variable Eddy Current Sensors

作　　者：吕春峰[1] 朱建平[1] 匡兴红[1] 叶海雄 LYU Chun-feng;ZHU Jian-ping;KUANG Xing-hong;YE Hai-xiong(College of Engineering Science and Technology,Shanghai Ocean University,Shanghai 201306,China)

机构地区：[1]上海海洋大学工程学院,上海201306

出　　处：《仪表技术与传感器》2018年第11期14-17,共4页Instrument Technique and Sensor

基　　金：上海海洋大学博士科研启动金项目(A2-0203-00-100343;A2-0203-00-100344)

摘　　要：文中提出了一种栅式结构的变面积电涡流位移传感器,该传感器将线圈以差动结构布局,采用不平衡阻抗桥式测量电路可直接输出差动后的传感器信号。文中按结构顺序详细介绍了测量系统中信号发生电路、阻抗桥式测量电路、解调电路以及输出差分放大电路。实验结果表明,采用差动结构的传感器测量电路不仅能有效提高传感器灵敏度和响应速度,而且还具备低功耗、共模误差小以及稳定性高等优点。An area-variable eddy current displacement sensor with grating structure was presented in this paper.The sensor coils were configured as a differential type,and the differential output signal was direct from an impedance bridge circuit.In this paper,the signal generation circuit,impedance bridge measurement circuit,demodulation circuit and output differential amplifier circuit were introduced in detail in the structure sequence.Experimental results show that the measuring system with differential structure can enhance the sensitivity,response speed,and it also has the outstanding aspects such as low power consumption,small common mode error and high stability.

关 键 词：变面积 电涡流传感器 测量系统 阻抗桥 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]