图像球面化算法在微通道板变形检测中的应用  

Application of Image Spherizing Algorithm in Deformation Detection for Micro-channel Plate

作　　者：赵冉 王久旺[1] 张弦[1] 冯跃冲[1] 周游[1] ZHAO Ran;WANG Jiu-wang;ZHANG Xian;FENG Yue-chong;ZHOU You(China Building Materials Academy,Beijing 100024,China)

机构地区：[1]中国建筑材料科学研究总院,北京100024

出　　处：《光子学报》2018年第11期131-139,共9页Acta Photonica Sinica

基　　金：特种玻璃纤维与光电功能材料研究院科技创新基金(No.BXKY-2018-03);山东省自然科学基金(Nos.ZR201702090137;ZR2017LA010)资助~~

摘　　要：基于球面化成像算法,提出了一种微通道板微尺度形变检测的方法.首先通过数学推演建立了图像球面化模型;然后以直线图像为标准图,对微通道板的形变做了成像模拟测试,解释了微通道板像旋转现象的产生机理;最后,根据模拟数据和扫描电子显微镜测量所得的形变结果,提出了双线形变检测方案,设计了检测仪器并制定了检测标准.光干涉仪的实际测量结果表明微通道板的实际形貌与模拟结果相符.当两条垂直直线在微通道板上的反射像的旋转夹角超过40°时该板被认为是不合格品;当旋转夹角小于7°时则被认为符合国军标中的平面度标准.该方法的测量精度可达1μm,已被应用于微通道板生产过程中.An image spherizing algorithm-baesd deformation detecting method for micro-channel plate is proposed.A rigorous mathematical deduction on image spherizing model is described in detail,subsequently a straight line image is chosen as standard picture and the imaging simulated test for deformed micro-channel plate is performed.According to the simulated results,the mechanism of image twisting phenomenon is described.At last,the deformation detection scheme of double lines method is proposed.The experimental set-up is designed and the detection standard is defined based on the simulated data and the planeness of micro-channel plate that measured by scanning electron microscope.The experimental result which obtained by interferometer showed that the actual profile characteristics of deformed micro-channel plate is consistent with the theoretical analysis.A micro-channel plate will be treat as defective product when the rotation angle of two orthogonal lines in the reflected image on the surface of micro-channel plate is greater than 40°,whereas the product will meet the military standard when the rotation angle is smaller than 7°.The accuracy of the proposed method can reach 1μm and it has been applied to the production process of micro-channel plate.

关 键 词：形变测量 机器视觉 图像球面化 微通道板 像旋转现象 检测 

分 类 号：TB96[机械工程—光学工程]