基于原子力显微镜的微间隙空气放电研究  

Research of Discharge in Micro-Gap Based on Atomic Force Microscope

作　　者：孙志[1,2] 付琳清 高鑫 韩柏[1] 孙伟峰[1] Sun Zhi;Fu Linqing;Gao Xin;Han Bai;Sun Weifeng(State Key Laboratory Breeding Base of Dielectrics Engineering Harbin University of Science and Technology Harbin 150080 China;Institute for Nanotechnology University of Waterloo Waterloo N2L3Gl Canada;Zaozhuang Power Supply Company of State Grid Shangdong Electric Power Company Zaozhuang 277000 China)

机构地区：[1]电介质工程国家重点实验室培育基地(哈尔滨理工大学),哈尔滨150080 [2]滑铁卢大学纳米技术研究所 [3]国网山东省电力公司枣庄供电公司,枣庄277000

出　　处：《电工技术学报》2018年第23期5616-5624,共9页Transactions of China Electrotechnical Society

基　　金：国家重点基础研究发展计划(973计划)(2012CB723308);国家自然科学基金(51607048);国家留学基金(留金发[2017]3192号);黑龙江省自然科学基金(QC2015C063);电气工程国家级实验教学示范中心(教高函[2013]10号)资助项目

摘　　要：微放电等离子体已广泛应用于诸多领域,但是汤逊放电理论不能合理解释介观尺度空气放电现象,为了深入探究微小间隙空气放电特性和确定场致发射对微放电的作用和机理,基于手动精密位移台和原子力显微镜(AFM)构建能实现微米距离控制的针板电极结构,研究了两种尺寸针板电极在大气压下、施加直流电压时的微间隙放电现象及机理。试验结果表明微间隙放电机理与长间隙有很大不同,间隙为15μm左右时针板裸电极可在空气中、常压下发生辉光放电;AFM针板电极不发生辉光放电,间隙小于2μm后预击穿电流变化趋势与FowlerNordheim公式描述的一致,击穿电压不随间隙距离变化,呈现场致发射放电机制。阴极场致发射放电导致负极性击穿电压低于相同间隙正极性击穿电压。通过AFM实现了针板电极放电微区域的定位和原位形貌表征。Micro-discharge plasma has been widely used in many fields,but the Thomson discharge theory can’t reasonably explain mesoscopic-scale air discharge phenomenon.In order to further explore the micro-gap air discharge characteristics and to determine the effect of field emission on micro-scale air discharge,the precision displacement plate and atomic force microscope(AFM)were used to construct the pin-plate electrode structure which can realize the micrometer distance control.The phenomena and mechanism of micro-gap discharge were investigated when the DC voltage was applied in atmosphere environment.The results show that the micro-gap discharge mechanism is very different from that between the long gap.When the gap is about 15μm,non-uniform electric field discharge generates continuous glow discharge or intermittent spark discharge.When the gap is less than 2μm,there is no glow discharge occurs.Fowler-Nordheim formula describes the same phenomena that breakdown voltage does not change with the gap distance,denoting that is the field emission mechanism.Cathode field emission discharge makes the negative breakdown voltage to be lower than the positive gap breakdown voltage in the same gap.The precise locating and in situ morphological characterization of pin-plate electrode discharging in microregions were achieved by AFM.

关 键 词：微放电 原子力显微镜 极性效应 原位检测 

分 类 号：TM213[一般工业技术—材料科学与工程] O461[电气工程—电工理论与新技术]