非固定环带随机双面抛光技术研究  

Research on non-fixed ring belt double-side polishing technology

作　　者：何曼泽 周佩璠[2] 黄颖[2] He Manze;Zhou Peifan;Huang Ying(Research Center of Laser Fusion,CAEP,P.O.Box919-988,Mianyang621900,China;Fine Optical Engineering Research Center,Chengdu610041,China)

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900 [2]成都精密光学工程研究中心,成都610041

出　　处：《强激光与粒子束》2018年第12期34-38,共5页High Power Laser and Particle Beams

基　　金：国家高技术发展计划项目

摘　　要：提出了一种基于平移偏摆运动的非固定环带随机双面抛光的方法,通过设计平移偏摆装置使得工件运动方式脱离固定环带的限制,借助随机性运动进行迭代,解决了行星式双面抛光等固定环带抛光过程中产生的周期性轨迹问题;通过优化运动方式组合,在随机性运动叠加情况下实现了大口径超薄元件面形稳定收敛控制。与行星式双面抛光相比,不仅面形精度更好,而且没有明显的周期性加工痕迹。该方法可以应用到对表面激光损伤阈值有特殊要求的超薄件批量生产当中。We have proposed a method of non-fixed ring belt random double-side polishing based on the technology of translational pendulum.A device based on translation and pendulum out of limits to fixed ring belt was designed.The iterations were carried out by random motion which solved the periodic trajectory problem in the process of fixed ring belt polishing.We developed a device coupling with double-side polishing based on active translation and pendulum.We have achieved stable control of the large-aperture ultra-thin component surface shape in the random motion superposition by optimizing the combination of movement mode.Compared with planetary double-side polishing,our method not only has better surface shape,but also has no obvious periodic processing trace.The method can be applied to batch production of ultra-thin parts with special requirements for laser damage threshold of surface.

关 键 词：非固定环带 随机双面抛光 大口径超薄元件 激光损伤阈值 

分 类 号：TG356[金属学及工艺—金属压力加工]