FIB加工、扫描及透射电子显微镜相结合的复杂合金相层状组织表征  

Lamellar microstructure in the complex alloy phases by focused ion beam processing, scanning and transmission electron microscopy

作　　者：周玲玲[1] 孙威[1] ZHOU Ling-ling;SUN Wei(Institute of Microstructure and Property of Advanced Materials,Beijing University of Technology,Beijing 100124,China)

机构地区：[1]北京工业大学固体微结构与性能研究所,北京100124

出　　处：《电子显微学报》2018年第6期590-595,共6页Journal of Chinese Electron Microscopy Society

基　　金：国家自然科学基金资助项目(No.11274027);北京市自然科学基金资助项目(No.2132019)

摘　　要：扫描电子显微镜(SEM)与聚焦离子束(FIB)可集成为双束系统,实现微区形貌观察与样品加工一体化,同时也可实现截面薄样品的定位提取。利用该技术并结合透射电镜(TEM)技术研究了Al-Pd-Fe复杂合金系铸态组织中层片结构的构成与分布特征。结果表明,铸态Al_(75)Pd_(15)Fe_(10)合金中的层片组织由M-Al_(13)Fe_4相与准晶相构成。通过对比发现,相同层片组织在背散射电子像与透射电镜观察下呈现出明显不同的分布特征。结合扫描与透射电子显微学成像原理,阐明了SEM和TEM两种表征方式产生不同结果的原因,指出了通过SEM,FIB以及TEM相结合对表征微细多相混合组织真实三维空间分布特征的必要性和有效性。Scanning electron microscopy(SEM)and focused ion beam(FIB)can be incorporated into a dual beam system which allows microscopic observation,in-situ processing and thin cross-section sample extraction to be realizable.By means of a combination of this system with transmission electron microscopy(TEM),the constitution and distribution for the lamellar structure formed in the as-cast Al 75 Pd 15 Fe 10 alloy have been investigated.The results show that the lamellar structure consists of M-Al 13 Fe 4 and quasicrystal phases.It is found that the distribution feature for the lamellar structure revealed by transmission electron microscopy and that by the backscattered electron imaging are obviously different.The reason for this has been clarified based on their distinctive imaging principles,through which one can realize that a combination of SEM,FIB and TEM is necessary and effective in order to characterize the real three-dimensional distribution features for fine mixtures of multiple-phases.

关 键 词：复杂合金相 片层组织 背散射电子成像 聚焦离子束 透射电子显微镜 

分 类 号：TB331[一般工业技术—材料科学与工程] TG113[金属学及工艺—物理冶金]