基于导模共振滤波器的波长可调谐垂直腔面发射激光器的研究  

Wavelength Tunable Vertical Cavity Surface Emitting Laser Based on Guided Mode Resonance Filter

作　　者：江孝伟 关宝璐[2] JIANG Xiao-wei;GUAN Bao-lu(College of Information Engineering,Quzhou College of Technology,Quzhou,Zhejiang 324000,China;Laboratory of Opto-electronics Technology,College of Electronic Information and Control Engineering, Beijing University of Technology,Beijing 100124,China)

机构地区：[1]衢州职业技术学院信息工程学院,浙江衢州324000 [2]北京工业大学光电子技术省部共建教育部重点实验室,北京100124

出　　处：《光子学报》2019年第1期128-134,共7页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.61575008;61650404);浙江省教育厅一般科研项目(Nos.Y201738091;Y201839950);衢州市科技计划项目(No.2017G16);江西省教育厅科技项目(No.GJJ170819);赣南师范大学招标课题(No.16zb04)~~

摘　　要：基于光栅层控制光波传播耦合波方程,设计了能够实现共振波长可调谐的亚波长光栅导模共振滤波器.通过调谐空气层的厚度,滤波器可以实现波长75nm的调谐,线宽均小于或等于1nm.将共振波长可调谐滤波器与中心波长为1.55μm的垂直腔面发射激光器(VCSEL)集成,形成了激射波长可调谐VCSEL.研究发现激射波长调谐范围与共振波长可调谐滤波器相同,而且在相同空气层厚度下,激射波长可调谐VCSEL的激射波长和共振波长可调谐滤波器的共振波长相同.该VCSEL不仅可以选择激射波长还可对输出横向模式进行选择.According to the coupled wave equation of grating layer controlling light wave propagation,a sub-wavelength grating guided mode resonance filter was designed.By tuning the thickness of air layer,the filter can tune the wavelength of75nm,and the linewidth is below or the same as1nm.The resonant wavelength tunable filter is integrated with a Vertical Cavity Surface Emitting Laser(VCSEL)of central wavelength of1.55μm,creating a lasing wavelength tunable VCSEL.It is found that the tuning range of lasing wavelength is identical to that of resonant wavelength tunable filter,and the wavelength of lasing wavelength tunable VCSEL is equal to that of resonant wavelength tunable filter at the same thickness of air layer.The VCSEL can choose both the lasing wavelength and the transverse mode of output.

关 键 词：光栅 导模共振 滤波器 可调谐 垂直腔面发射激光器 

分 类 号：TN256[电子电信—物理电子学]