数字微镜器件的远场焦斑测量方法  

Far-field focal spot measurement based on DMD

作　　者：李铭 袁索超 李红光[1] 达争尚[1] Li Ming;Yuan Suochao;Li Hongguang;Da Zhengshang(Xi'an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi'an 710119,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院西安光学精密机械研究所,陕西西安710119 [2]中国科学院大学,北京100049

出　　处：《红外与激光工程》2018年第12期170-174,共5页Infrared and Laser Engineering

基　　金：中国科学院国防重点实验室基金(Y629941213)

摘　　要：提出了一种基于数字微镜器件(Digital Micro-mirror Device,DMD)的高功率激光远场焦斑大动态测量方法。采用DMD对焦斑主瓣和旁瓣区域进行分离,用两路CCD分别测量,通过图像拼接实现两路测量结果的融合,获得大动态焦斑数据。DMD由数字信号控制,通过改变控制信号模板,可以快速适应不同形态焦斑的测量。具体分析了DMD焦斑分割原理及DMD控制信号模板的获取,说明了焦斑重构时所需的图像校正和对准方法,实验验证了新方法的可行性。结果表明:文中方法的测量动态范围可以达到3 000:1以上。Based on digital micro-mirror device(DMD),a novel method for measuring high power laser far-field focal spot with high dynamic range was proposed.The region of focal spot was divided into two segments with different intensity range through DMD,and then captured by two CCD respectively.Image fusion technique was used to put two results together and the intensity distribution of high dynamic range focal spot was acquired.Based on the digital control of DMD,focal spot with different forms can be measured efficiently.The principle of focal spot division using DMD and the approach to obtain DMD control signal template were analyzed and the procedures of image calibration and registration for focal spot reconstruction were explained.The feasibility of the new method was verified by experiment.The results show that a dynamic range of3000:1is achieved through the proposed method.

关 键 词：远场焦斑测量 数字微镜器件 大动态 投影变换 

分 类 号：TN247[电子电信—物理电子学]