指纹状碳薄膜在润滑油作用下的摩擦学性能  

Tribological performance of fingerprint-like carbon film under action of lubricant

作　　者：俞树荣[1] 马巍 龚珍彬 张俊彦[2] YU Shu-rong;MA Wei;GONG Zhen-bin;ZHANG Jun-yan(School of Petrochemical Engineering,Lanzhou Univ. of Tech.,Lanzhou 730050,China;State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Lanzhou 730000,China)

机构地区：[1]兰州理工大学石油化工学院,甘肃兰州730050 [2]兰州化学物理研究所固体润滑国家重点实验室,甘肃兰州730000

出　　处：《兰州理工大学学报》2018年第6期69-73,共5页Journal of Lanzhou University of Technology

基　　金：科技部973项目(2013CB632300)

摘　　要：利用高功率脉冲等离子体增强化学气相沉积(HIP-PECVD)技术,在硅基底表面制备指纹状的碳基薄膜(FPC∶H).通过Tecnai-G2F30型高分辨透射电镜(HRTEM)以及LABRAM HR 800型拉曼光谱仪对薄膜的结构进行表征;利用往复摩擦试验机、奥林巴斯STM6测量显微镜和3D轮廓仪分析比较薄膜在润滑油作用下的摩擦性能.实验结果表明:所制备的碳基薄膜具有独特的指纹状类石墨烯结构;在三羟甲基丙烷油酸酯(TMPTO)作为润滑油的条件下,指纹状类石墨烯碳基薄膜在低载荷下表现出良好的减摩性能;在高载荷下表现出优异的抗磨性能,因此指纹状碳薄膜在润滑油作用下具有巨大的发展潜力和实用前景.The fingerprint-like carbon-based films(FP-C∶H)were prepared on surface of silicon substrate with technique of high-power pulsed plasma-enhanced chemical vapor deposition.The structure of the films was characterized by means of Tecnai-G2F30-type high-resolution transmission electron microscope(HRTEM)and LABRAM HR800-type Raman spectroscope.The tribological behavior of the films in case of various lubricants were analyzed and compared by means of reciprocating friction tester,Olympus STM6measuring microscope,and3-D contourgraph.The experimental result showed that the fabricated film would have unique fingerprint-like quasi-graphene structure and exhibit fine friction reduction under low load and excellent wear resistance ability under high load with TMPTO as lubricant.Therefore,the fingerprint-like carbon films under the action of the lubricant would have an outstanding development potential and practical prospect.

关 键 词：高功率脉冲等离子体增强化学气相沉积 指纹状碳薄膜 润滑油 摩擦性能 

分 类 号：TQ051[化学工程]