四极质谱仪在微波真空电子器件中的应用  

Applications of Quadrupole Mass Spectrometers in Microwave Vacuum Electronic Devices

作　　者：董笑瑜 梁田 范亚松 DONG Xiao-yu;LIANG Tian;FAN Ya-song(Nanjing Sanle Group Co.,Ltd., Nanjing 211800, China)

机构地区：[1]南京三乐集团有限公司,江苏南京210009

出　　处：《真空电子技术》2018年第6期61-65,69,共6页Vacuum Electronics

摘　　要：微波真空电子器件广泛应用于军用雷达、卫星通信、导航、探测等领域。随着技术的发展,对微波器件不断提出更高的要求,尤其是长寿命、高可靠要求,这对工艺技术研究和过程控制方面提出了极高的要求,其中超高真空的获得技术是实现器件贮存寿命、工作寿命、可靠性的前提。采用四极质谱仪分析技术,可以对排气工艺的合理性以及零件工艺过程洁净链的效果进行检测,同时对封离前器件内部的残余气体种类进行定性分析和判断,从而实现提高器件可靠性的目的。在本文中,以某大功率行波管为试验对象,结合系统真空度的测试,采用四极质谱仪对其阴极的预处理过程(二极管)以及整管排气过程中的气体进行实时监控,对其放气特性进行了研究与分析。Microwave vacuum electronic devices are widely used in military radars, satellite communication, navigation, detection and other fields. With the technology development, higher requirements are put forward especially for long life and high reliability. This brings higher request to technological research and process control. Among them, the ultra-high vacuum acquisition technology is the precondition of high reliability, long working life and long storage period. Quadrupole mass spectrometer can detect the rationality of exhaust technology and the effect of clean chain in exhaust process, analyze and judge the residual gas in device before sealing and thus improve the reliability of devices. In this paper, a high power traveling wave tube is taken as the test object. Combined with system vacuum measurement, the gas in cathode pretreatment process and in whole tube exhausting process are real-time monitored by quadrupole mass spectrometer, and the exhaust characteristics of the high power traveling wave tube are studied and analyzed.

关 键 词：微波真空电子器件 超高真空获得技术 四极质谱仪 放气特性 

分 类 号：TN107[电子电信—物理电子学]