基于恒加热功率的热损失型微型流量传感器  

Heat Loss Micro Flow Sensor Based on Constant Heating Power

作　　者：冷寒冰 袁伟 崔建国 崔祺铭 LENG Han-bing;YUAN Wei;CUI Jian-guo;CUI Qi-ming(College of Pharmacy and Bioengineering,Chongqing University of Technology,Chongqing 400054,China;Life Science Department,McGill University,Montreal H3A 1R9,Canada)

机构地区：[1]重庆理工大学药学与生物工程学院,重庆400054 [2]麦吉尔大学生命科学系

出　　处：《仪表技术与传感器》2018年第12期14-18,24,共6页Instrument Technique and Sensor

基　　金：国家科技支撑计划项目(2015BA101B14);重庆理工大学高等教研研究项目(2015YB27)

摘　　要：相比于传统的流量传感器,微型流量传感器具有体积小、功耗低、对微小流量测量灵敏度高等特点。文中依据传热学原理设计并研制了一种基于恒加热功率的热损失型微型流量传感器系统,用于微流体的流量测量。文中利用数字光刻投影系统(DLPS)加工制作了加热电极和流路通道的模板,选择ITO导电玻璃制作薄膜加热电极和流路基底,使用聚二甲基硅氧烷(PDMS)制作微型流路的通道,同时借助氧等离子体激活实现ITO导电玻璃与PDMS流路通道的不可逆封装键合。该微型流量传感器系统利用STC12C5A系列单片机对硬件电路进行控制及流量测量结果显示,并借助数字注射泵对流量传感器系统进行了测试和验证。该微型流量传感器可实现10～120μL/min的较精确测量。Compared to traditional flow sensors,micro flow sensors are characterized for its small size,low power consumption and high sensitivity for micro flow measurement.This article described a heat loss micro flow sensor system based on constant heating power designed and developed for measuring flow of micro fluid.A template for heating electrodes and flow channels was made using a digital lithography projection system (DLPS).ITO conductive glass was used to provide substrate and thin film heating electrode, polydimethylsiloxane (PDMS)was used to make microfluidic channels.At the same time,oxygen plasma treatment was chosen to achieve ITO conductive glass and the PDMS flow channel s irreversible package bonding.STC12C5A microcontroller was used to control the hardware circuit and display the flow measurement results in the micro flow sensor system,and the flow sensor system was tested and validated by means of a digital injection pump.The micro flow sensor can achieve an accuracy of 10~120 μL/min.

关 键 词：微型流量传感器 ITO导电玻璃 聚二甲基硅氧烷 数字光刻投影系统 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]