氧化铟/氧化铬异质材料的制备及其高气敏响应性能研究  

Preparation and high gas sensing performance of In_2O_3/Cr_2O_3 heterostructure material

作　　者：姜玮[1] 崔彦发 曾庆毫 姚有为[1] Jiang Wei;Cui Yanfa;Zeng Qinghao;Yao Youwei(Advanced Materials Institute,Graduate School at Shenzhen,Tsinghua University,Shenzhen 518055,China)

机构地区：[1]清华大学深圳研究生院新材料研究所,广东深圳518055

出　　处：《无机盐工业》2019年第1期73-77,共5页Inorganic Chemicals Industry

摘　　要：通过微波反应法合成了MIL-68(In),并将MIL-68(In)与氯化铬(CrCl3)以不同质量比进行掺混,通过固相反应法制备了氧化铬与氧化铟共烧结产物,并研究了其气敏特性。实验结果表明,铬元素的存在明显提高了氧化铟的气敏特性。其中MIL-68(In)与氯化铬混合质量比为10∶1.5时所获共烧结样品最佳,对体积分数为2×10^(-4)的乙醇响应值从纯氧化铟的15.8提高到30.3,而对体积分数为5×10^(-4)的乙醇响应值达到了46.4。该样品对乙醇气体的响应值远高于丙酮、甲苯、一氧化碳与甲烷,具有良好的选择性。最后,从表面耗尽层机制与化学机制两方面对样品的高气敏性能机理进行了分析讨论。MIL-68(In)was synthesized via microwave method and mixed with chromium chloride(CrCl3)at different mass ratios to contain the co-sintering products of chromium oxide and indium oxide by solid state reaction method.The gas sensitivity characteristics of the products were also studied.The experimental results showed that the presence of Cr elements obviously improved the gas sensitivity of In2O3.When the mixing ratio was 10∶1.5,the sample was the best and the sample′s response value for 2×10^-4(volume fraction)ethanol increased was improved to 30.3 from 15.8 compared with that of pure indium oxide,while the response value for 5×10^-4 ethanol was 46.4.At the same time,the response of the sample to the ethanol gas was much higher than acetone,toluene,CO and methane,showing good selectivity.Finally,the reason of the high gas sensing performance was discussed via surface depletion layer mechanism and chemical mechanism.

关 键 词：气敏传感器 氧化铬掺杂氧化铟 乙醇 P-N结 

分 类 号：TQ133.53[化学工程—无机化工]