对称非球面镜的对比法独立在位测量和补偿磨削  

Compensation grinding and independent on-machine measurement of symmetric aspheric mirror

作　　者：李彬[1] 席建普[1] 任东旭[1] 赵则祥[1] 赵惠英[2] LI Bin;XI Jianpu;REN Dongxu;ZHAO Zexiang;ZHAO Huiying(School of Mechatronics Engineering,Zhongyuan University of Technology,Zhengzhou 451191,CHN;School of Mechanical Engineering,Xi'an Jiaotong University,Xi'an 710049,CHN)

机构地区：[1]中原工学院机电学院,河南郑州451191 [2]西安交通大学机械工程学院,陕西西安710049

出　　处：《制造技术与机床》2019年第2期129-134,共6页Manufacturing Technology & Machine Tool

基　　金：国家青年科学基金项目(51705546);河南省高等学校重点科研项目(16A460030;18B460024)

摘　　要：为提高大口径非球面镜磨削阶段的在位测量和补偿磨削精度,提出了具有独立在位测量框架的补偿磨削系统,对该系统的测量原理、测量框架和补偿方法进行了研究。首先介绍基于直线运动轴和长度计组成的测量框架以及对比法在位测量原理。以此测量原理为基础,介绍了具有独立在位测量框架的磨削系统,并提出了基于砂轮磨削路径的测量基准路径生成方法;采用180 mm口径K9镜片进行了在位测量,并与Taylor Hobson PGI1250进行了交叉对比测量试验,验证了所构建在位测量框架的可靠性。采用样条拟合和共轭法来生成补偿路径。通过300 mm口径熔石英材料对称非球面镜的磨削试验,进行了在位测量和补偿磨削的验证。通过补偿磨削,将面形精度由35μm提高至4μm;与Taylor Hobson PGI1250的测量结果进行了交叉对比,试验结果表明所提出的独立在位测量框架测量结果可靠,补偿磨削效果稳定可靠。In order to improve the in-situ measuring and compensation grinding accuracy during the large aspheric mirror grinding stage,the compensation grinding system with dependent in-situ measuring frame was proposed,the measuring principle,frame and compensation grinding method was studied.First,based on the absolute comparison in-situ measuring principle,the independent measuring frame was built using one linear axis and length gauge.The grinding system with on-machine measuring frame was introduced.Compensation method for the length gauge probe radius was proposed according to the grinding wheel path.To verify credibility of the proposed on-machine metrology system,a 180 mm K9 mirror was measured and the result was cross tested using Taylor Hobson PGI1250,it indicated that the proposed measuring system is credible.The compensation grinding path was generated using spline fitting and conjugation method.The on-machine measurement and compensation grinding experiment was carried out using one symmetric aspheric mirror of 300 mm diameter.Profile error could be improved to be less than 4μm from 35μm after compensation grinding.Cross test was carried out using Taylor Hobson PGI1250,the comparison measurement results indicates that the proposed independent measuring frame is reliable and the compensation grind method is effective.

关 键 词：独立测量框架 在位测量 补偿磨削 非球面镜 

分 类 号：TP394.1[自动化与计算机技术—计算机应用技术] TH691.9[自动化与计算机技术—计算机科学与技术]