氟化钙对单晶硅片磨削用树脂结合剂金刚石砂轮磨削性能的影响  

Effect of calcium fluoride on grinding performance of resin-bonded diamond grinding wheel for silicon wafer

作　　者：丁玉龙 惠珍 熊华军 赵延军 包华 DING Yulong;HUI Zhen;XIONG Huajun;ZHAO Yanjun;BAO Hua(State Key Laboratory of Superabrasives, Zhengzhou Research Institute for Abrasives & Grinding Co. , Ltd. , Zhengzhou 450001, China)

机构地区：[1]郑州磨料磨具磨削研究所有限公司超硬材料磨具国家重点实验室,郑州450001

出　　处：《金刚石与磨料磨具工程》2019年第1期36-40,共5页Diamond & Abrasives Engineering

基　　金：国家科技支撑计划课题(2015BAF31B00)

摘　　要：在单晶硅片磨削用树脂结合剂金刚石砂轮中分别添加不同体积分数的固体润滑剂氟化钙(CaF_2),评估其对砂轮表面结构、砂轮磨损量、磨床主轴电流的影响,并测量和计算单晶硅片的表面粗糙度和表面损伤层厚度。结果显示:随CaF_2用量增加,磨床主轴电流、砂轮磨损量、单晶硅片的表面粗糙度值和表面损伤层厚度均下降;当CaF_2体积分数为25%时,主轴电流降至约6.4 A,砂轮磨损量降到每片0.448 6μm,单晶硅片的表面粗糙度R_a、R_y和R_z分别为0.056μm、0.382μm和0.396μm,表面损伤层厚0.559 6μm。加入CaF_2固体润滑剂可有效改善树脂金刚石砂轮的性能,提高单晶硅片表面的加工质量,且CaF_2体积分数为25%时效果最佳。Solid lubricant Calcium fluoride(CaF 2)with different volume fractions is added into resin-bonded diamond wheels for single crystal silicon wafer grinding.Its influence on surface structure and wear ratio of the wheel,as well as the spindle current of grinding machine,is analyzed.The surface roughness of the wafer and the thickness of damage layer on its surface are measured and calculated.Results show that as the content of CaF 2 increases,the current,the wear ratio and the surface roughness and damage layer thickness all decrease.When the volume fraction of CaF 2 added is 25%,the current is about 6.4 A,and wear ratio of wheel decreased to 0.448 6μm,with R a 0.056μm,R y 0.382μm and R z 0.396μm on the wafer surface and thickness of damage layer 0.559 6μm.In conclusion,the performance of resin-bonded diamond wheels and the quality of machined single crystal silicon wafer could be enhanced by adding CaF 2 as solid lubricant,and the best volume fraction of CaF 2 is 25%.

关 键 词：表面结构 砂轮磨损量 表面粗糙度 表面损伤层 

分 类 号：TG58[金属学及工艺—金属切削加工及机床] TG74