树脂硬度对金刚石切割线切割性能的影响  

Effect of resin hardness on cutting performance of resin diamond wire

作　　者：高伟[1] 李军 马伯江[1] 王东雪 GAO Wei;LI Jun;MA Bojiang;WANG Dongxue(College of Electromechanical Engineering, Qingdao University of Science and Technology,Qingdao 266061, Shandong, China;Qingdao Gaoce Technologies Inc. , Qingdao 266114, Shandong, China)

机构地区：[1]青岛科技大学机电工程学院,山东青岛266061 [2]青岛高测科技股份有限公司,山东青岛266114

出　　处：《金刚石与磨料磨具工程》2019年第1期72-75,共4页Diamond & Abrasives Engineering

基　　金：山东省自然科学基金的资助(ZR2017MEE076)

摘　　要：研究不同树脂结合剂对金刚石切割线切割性能的影响。分别采用纯酚醛树脂、环氧改性酚醛树脂、芳烷基改性酚醛树脂制备树脂固化硬度试样,并检测试样的肖氏硬度。用扫描电镜观察树脂固化后的试样断裂表面,发现不同树脂固化后的致密程度不同。分别制作金刚石切割线进行单晶硅切割实验。实验结果表明:采用固化硬度高、固化后致密性好的纯酚醛树脂制作的切割线在切割时的线弓最小,加切时间较短,金刚石颗粒不易脱落,切割能力强。The effects of different resin binders on the cutting performances of diamond wire were studied.Resin hardness samples were prepared with pure phenolic resin,epoxy modified phenolic resin and aryl modified phenolic resin respectively,and Shaw hardness of the samples was tested.Fracture surface of resin cured samples were observed by scanning electron microscopy.It was found that the densification of different resin cured sample was different.The resin diamond wires were made with these resins,and the monocrystalline silicon cutting experiment was carried out.The experimental results show that the diamond wire made of pure phenolic resin with high hardness and good compactness after curing has the smallest arch and shorter cutting time,and that the diamond particles are not easy to fall off thus possessing a strong cutting ability.

关 键 词：树脂固化 肖氏硬度 断裂表面 硅片切割 

分 类 号：TG74[金属学及工艺—刀具与模具] TQ164[化学工程—高温制品工业]