电容式加速度传感器机电耦合分析  

Electro-mechanical coupled analysis of capacitive acceleration sensor

作　　者：牟维兵[1] MU Wei-bing(Simulation Center,Institute of Computer Application,CAEP,Mianyang 621900,China)

机构地区：[1]中国工程物理研究院计算机应用研究所仿真中心,四川绵阳6219001

出　　处：《电子设计工程》2019年第5期36-39,43,共5页Electronic Design Engineering

摘　　要：为了研究电容式加速度传感器在受加速度外力作用过程中其端口电流的变化情况,建立了一个电容式传感器模型。在对电容模型进行有限元固体力学分析的基础上,将有限元模型代入电路中,通过机械、电路耦合仿真的方法模拟电容传感器端口的电流变化。模拟结果清楚显示了加速度作用对电容端口电流的影响,传感器所受加速度作用大小与其电流并非简单的线性关系,还与加速度方向紧密相关。只有机电耦合的分析方法才能揭示传感器电流在加速度加载时电流的变化过程。A capacitive sensor model is built up in order to study the current of a acceleration sensor while being influenced by acceleration tension.Firstly the solid mechanism of the sensor has been analyzed with FEM.Then the FEM model is combined in a circuit,and the current of the sensor is simulated with electro-mechanical coupled simulation method.The result of the simulation shows clearly that the current of termination is dominated by the acceleration effect.The current of capacitive sensor is not a simple linear with the acceleration.And the current is greatly affected by the direction of the acceleration.Only this simulation method can reveal the current changing process while loaded with acceleration.

关 键 词：电容式传感器 加速度荷载 固体力学 机电耦合模拟 电流 

分 类 号：TN06[电子电信—物理电子学]