AZO/Ag/AZO透明导电薄膜的制备及其物性分析  

作　　者：杨波[1] 

机构地区：[1]长春理工大学,吉林长春130022

出　　处：《科技创新与应用》2019年第8期96-97,共2页Technology Innovation and Application

摘　　要：文章在溶胶燃烧法制备的AZO薄膜的基础上,将银层导入其中,制备出AZO/Ag/AZO三层结构透明导电薄膜。并对得到的透明导电薄膜进行分析研究。最终成功降低了溶胶燃烧法制备的薄膜的电阻率。In this paper,based on the AZO thin films prepared by sol combustion method,the silver layerwas introduced into it,and the AZO/Ag/AZO three-layer transparent conductive thin films were prepared.The transparent conductive thin films were analyzed and studied.Finally,the resistivity of the films prepared by sol combustion method was successfully reduced.

关 键 词：AZO/Ag/AZO 溶胶燃烧 AZO 真空蒸镀 

分 类 号：TB383[一般工业技术—材料科学与工程]