激光回馈测量技术在航空精密制造中的应用  

Applications of Laser Feedback Measurement Technology in Aviation Precision Manufacturing

作　　者：谈宜东[1] 李继扬[1] 朱开毅 卢悦越 TAN Yidong;LI Jiyang;ZHU Kaiyi;LU Yueyue(State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument,Tsinghua University, Beijing 100084, China)

机构地区：[1]清华大学精密仪器系精密测试技术及仪器国家重点实验室,北京100084

出　　处：《航空制造技术》2019年第5期24-36,共13页Aeronautical Manufacturing Technology

基　　金：国家基金委优秀青年基金项目(51722506);国家重大科学仪器设备开发专项(2011YQ04013603);精密测试技术及仪器国家重点实验室自主研究课题

摘　　要：航空精密制造技术的发展水平已经成为衡量国家综合实力和科技发展水平的重要标志之一。随着机械加工技术、电子电气技术、自动控制技术以及信息技术的高速发展,在此之上集成的航空精密制造技术得到了空前的飞跃,不断涌现出新技术、新工艺和新产品。与此同时,随着技术和产品的精度性能逐渐提高,对关键参数的精密测量的需求逐步增大。但是对于航空制造中的器件而言,很多测量需求无法由传统的测量方案满足。激光回馈效应是指激光器出射的激光被外部待测物体表面反射或者散射回到激光器内对激光器输出光强、偏振态和相位进行调制的一种现象。激光回馈效应进行精密测量具有高灵敏度,可实现非配合目标,如黑色、粗糙、柱面、微小型或液体目标的测量;结构紧凑,易于调节;测量结果分辨率高,可溯源到激光波长等优点。利用激光回馈效应,可以对航空制造中的零件进行精密测量,实现加工过程中的精密定位和部件实时工况的精密监测,对于提高航空制造精度,促进行业发展具有不可替代的作用。The development level of aviation precision manufacture technology has already become one of the important signs to weigh the comprehensive strength and the development of science and technology of the country. With the fast development of mechanical processing, electronics and electrics, automatic control and information techniques, the aviation precision manufacture technology, which is on the basis of these techniques, has made an unprecedented leap forward, new technologies, new processes and new products have been emerging. At the same time, with the increase of precision and performance in techniques and products, the demands for precision measurement of key parameters are growing. However, for devices in aviation manufacturing, many requirements cannot be met by the traditional measuring methods. The laser feedback effect is a phenomenon where the laser emitted from the laser is reflected or scattered by the surfaces of the targets and returns back into the laser cavity, modulating the intensity, polarization state, and the phase of the laser. In the precision measurement field, the laser feedback effect has the advantage as high sensitivity, which can measure noncooperative targets such as black, rough, cylindrical, micro or liquid targets;compact structure and easy alignment;high resolution and traceability to the laser wavelength. By using the laser feedback effect, precision measurement of aviation product can be carried out, realizing the precision locating and monitoring of real time working condition, which plays an irreplaceable role in improving the precision of aviation manufacturing and promoting the development of the industry.

关 键 词：激光回馈 航空制造 精密测量 非配合目标 原位检测 

分 类 号：V261[航空宇航科学与技术—航空宇航制造工程]