溶胶-凝胶法制备ZnO:Al膜及性能研究  

Preparation and Properties of ZnO:Al Films by Sol-gel Method

作　　者：陈炳炎[1] 谢春生 陈丹[1] CHEN Bingyan;XIE Chunsheng;CHEN Dan(Department of Architecture and Environmental Engineering,Guangdong Polytechnic of Water Resources and ElectricEngineering,Guangzhou Guangdong 510635)

机构地区：[1]广东水利电力职业技术学院建筑与环境工程系,广东广州510635

出　　处：《河南科技》2019年第1期113-115,共3页Henan Science and Technology

基　　金：校企合作对外服务平台项目(cxp06y)

摘　　要：本文以玻璃为载体,应用溶胶-凝胶法制备掺铝ZnO镀膜玻璃,并对制备的ZnO:Al镀膜玻璃进行性能测试,研究透过率的影响因素、不同热处理温度对制备的ZnO:Al镀膜玻璃性能的影响。经研究发现,Al掺量为3%、层数为5、热处理温度450℃时,透射率最好,具有最好的透射性,可作增透膜;ZnO薄膜中晶体生长热处理温度为400～450℃,保温时间在90min时,晶体生长效果最佳。In this paper,aluminum doped ZnO coated glass was prepared by sol-gel method using glass as carrier.The performance of ZnO:Al coated glass was tested.The influence factors of transmittance and the effect of different heat treatment temperature on the properties of ZnO:Al coated glass were studied.It was found that the best transmittance and antireflective film could be obtained when the Al content is 3%,the layer number was 5 and the heat treatment temperature was 450℃.The heat treatment temperature of crystal growth in ZnO film was 400~450℃and the holding time was 90min.

关 键 词：ZnO:Al膜 溶胶-凝胶法 镀膜玻璃 透过率 热处理温度 

分 类 号：TB383.2[一般工业技术—材料科学与工程]