薄膜厚度对Si基SiO_2薄膜力学性能的影响  

Effect of Film Thickness on Mechanical Properties of Si-based SiO_2 Thin Films

作　　者：聂晓梦 李继军[1,2] 郎风超 张伟光[1] 赵春旺[1,3] 邢永明[1] Nie Xiaomeng;Li Jijun;Lang Fengchao;Zhang Weiguang;Zhao Chunwang;Xing Yongming(College of Sciences, Inner Mongolia University of Technology, Hohhot 010051, China;College of Arts and Sciences, Shanghai Maritime University, Shanghai 201306, China;Inner Mongolia Key Laboratory of Civil Engineering Structures and Mechanics,Hohhot 010051, China)

机构地区：[1]内蒙古工业大学理学院,呼和浩特010051 [2]内蒙古自治区土木工程结构与力学重点实验室,呼和浩特010051 [3]上海海事大学文理学院,上海201306

出　　处：《机械科学与技术》2019年第4期646-651,共6页Mechanical Science and Technology for Aerospace Engineering

基　　金：国家自然科学基金项目(11562016;11762013;11762014);内蒙古自然科学基金项目(2018MS01013);国家留学基金项目(20145049);内蒙古工业大学科研项目(X201713)资助

摘　　要：为了研究薄膜厚度对Si基SiO_2薄膜力学性能的影响规律,利用纳米压痕技术及有限元模拟方法对不同厚度的Si基SiO_2薄膜材料进行测试,分析了不同厚度薄膜的硬度及弹性模量等力学性能,讨论了不同压深膜厚比对不同厚度薄膜弹性恢复率的影响,并在试验的基础上,建立了有限元模型,模拟了不同厚度薄膜在相同压深下的载荷位移关系,分析了薄膜的弹性恢复性能。结果表明:SiO_2薄膜越厚其弹性模量越小,而薄膜的硬度在薄膜较薄时压痕的尺寸效应更明显,并利用模拟进一步分析得出薄膜越薄弹性恢复性能越好。In order to study the effect of the film thickness on the mechanical properties of Si-based SiO2 films, nanoindentation technology and finite element simulation of ABAQUS were used to test Si-based SiO2 films with different thicknesses. The mechanical properties including the hardness and elastic modulus of films with different thicknesses were analyzed. The effects of the pressure depths and film thickness ratios on the elastic recovery rate of films with different thicknesses are discussed. Based on the experiments, the finite element model was established. The load-displacement relationship of films with different thickness under the same pressure depth was simulated, and the elastic recovery performance of the film was analyzed. The results show that the thicker the SiO2 film is, the smaller the elastic modulus is. When the film is thin, the size effect of the indentation of the film is more obvious, and further analysis by using simulation shows that the thinner the film is, the better the elastic recovery performance is.

关 键 词：Si基SiO2薄膜 纳米压痕 有限元模拟 弹性模量 硬度 

分 类 号：TG147[一般工业技术—材料科学与工程]