CO_2激光多程平移法制备高质量梯形PMMA微通道  

Preparation of high quality trapezoid PMMA micro-channels by CO_2 laser multi-path translational method

作　　者：吴天昊 柯常军[1] 姜永恒[3] 孔心怡[1,2] 钟艳红 Wu Tianhao;Ke Changjun;Jiang Yongheng;Kong Xinyi;Zhong Yanhong(Institute of Electronics,Chinsese Academy of Sciences,Beijing 100190,China;University of Chinese Academy of Sciences,Beijing 100490,China;Department of Physics.Jilin University,Changchun 435100,China)

机构地区：[1]中国科学院电子学研究所,北京100190 [2]中国科学院大学,北京100490 [3]吉林大学物理学院,吉林长春435100

出　　处：《红外与激光工程》2019年第3期88-92,共5页Infrared and Laser Engineering

基　　金：国家自然科学基金(61475157)

摘　　要：由于非金属材料对长波红外激光有较强的吸收,CO_2激光常被用于制备PMMA微通道。激光光强呈高斯分布,导致常规激光静态多程刻蚀法制备的微通道截面为三角形,无法满足微流体芯片中的实际应用需求。提出了一种激光多程平移刻蚀法,以首次刻蚀形成的热影响区(HAZ)为界限多程横向重叠平移刻蚀,可以快速制备出理想梯形截面的高质量微通道。通过与CO_2激光静态多程刻蚀法在横截面、热影响区、表面粗糙度等方面的对比,结果表明,CO_2激光多程平移刻蚀法制备的PMMA微通道热影响区更小、表面更光滑、横截面更实用。As non-metallic materials have strong absorption of long-wave infrared laser,the CO2 laser is often used to prepare PMMA micro-channels.Due to the Gaussian distribution of the laser light intensity,the cross-section of the micro-channels prepared by the conventional method is triangular.This can′t meet the practical application requirements in the microfluidic chip.In this paper,a CO2 laser multi-path translational method was proposed,which used the HAZ formed by the first etching as a boundary multipass lateral overlap translation etching,so that high quality micro-channels with ideal trapezoid cross section can be quickly prepared.In addition,the micro-channel fabricated in this way is smoother and more practical compared with the static multi-pass method in cross-section,HAZ,surface roughness.

关 键 词：微通道 CO2激光 梯形通道 PMMA 

分 类 号：TN249[电子电信—物理电子学]