微波电子回旋共振等离子体阴极电子束的实验研究  

Experimental study of electron beam based on microwave electron cyclotron resonance plasma cathode

作　　者：李亮[1,2,3,4] 刘亦飞 陈龙威[3] 王功[1,4] 刘鸣[1,2,4] 任兆杏[3] 刘兵山 赵光恒[1,5] LI Liang;LIU Yi-fei;CHEN Long-wei;WANG Gong;LIU Ming;REN Zhao-xing;LIU Bing-shan;ZHAO Guang-heng(Tech no logy and engineering center for space utilization, Chinese Academy of Sciences, Beijing 100094;University of Chinese Academy of Sciences, Beijing 100049;Institute of plasma physics, Chinese Academy of Sciences, Hefei 230031;Key Laboratory of Space Manufacturing Technology, Chinese Academy of Sciences, Beijing 100094;Key Laboratory of Space Utilization, Chinese Academy of Sciences, Beijing 100094)

机构地区：[1]中国科学院空间应用工程与技术中心,北京100094 [2]中国科学院大学,北京100049 [3]中国科学院等离子体物理研究所,合肥230031 [4]中国科学院太空制造技术重点实验室,北京100094 [5]中国科学院太空应用重点实验室,北京100094

出　　处：《核聚变与等离子体物理》2019年第1期21-27,共7页Nuclear Fusion and Plasma Physics

基　　金：国家自然科学基金(11575252;11775270);安徽省自然科学基金(1708085MA26);辽宁省自然科学基金(20170540571)

摘　　要：介绍了实验室研制的微波电子回旋共振(ECR)等离子体阴极电子束系统及初步研究结果,该系统包括微波ECR等离子体源、电子束引出极、聚焦线圈等。通过测量水冷靶电流和靶上的束斑尺寸,实验研究了微波ECR等离子体阴极电子束的流强、聚束性能等随电子束系统工作条件的变化。结果表明:微波输入功率越高、引出电压越高,引出电子束流强越大;工作气压对电子束流强的影响较复杂,随气压增加呈现出先降低后升高的特点;在7×10-4Pa的极低气压下电子束流强可达75m A,引出电压9kV;能量利用率可达0.6;调整聚焦线圈的驱动电流,电子束的束斑直径从20mm减小到13mm,电子束流强未有明显变化。The generation and control of microwave electron cyclotron resonance(ECR) plasma cathode electron beam is studied experimentally. A complete set of discharge, electron beam extraction, focusing and measuring system was set up. The characteristics and performance of microwave ECR plasmas as electron beam extraction source were studied by measuring the current of water cooling target and the beam spot size on the target. Experimental results indicated that both microwave input power and accelerating voltage are conducive to improving electron beam current. The influence of gas pressure on the electron beam current was complex. With the increase of gas pressure, the electron beam current is characterized by decreasing first and then increasing. The extracted electron current of microwave ECR plasma cathode can reach 75 mA at gas pressure of 7×10-4 Pa, and the energy of the electron beam can reach 9 keV. The energy utilization can reach 0.6. By adjusting the current of the focusing coil, the diameter of electron beam spot is reduced from 20 mm to 13 mm and the electron beam current keeps the value unchanged.

关 键 词：微波回旋共振 等离子体阴极 电子束 

分 类 号：O461.2[理学—电子物理学]