基于双路多光束干涉的光程微变动实时监测技术  

Real-time Monitoring Techniques of Optical Path Micro-change Based on Two-channel Multi-beam Interference

作　　者：黄维[1] 高宏堂[2,3] 张福民 魏冰莹[4] HUANG Wei;GAO Hong-tang;ZHANG Fu-min;WEI Bing-ying(Tianjin University, Tianjin 300072, China;National Institute of Metrology, Beijing 100029, China;Beihang University, Beijing 100191, China;Beijing Standard Quality Monitoring Center for Electro-mechanical Products, Beijing 100027, China)

机构地区：[1]天津大学,天津300072 [2]中国计量科学研究院,北京100029 [3]北京航空航天大学,北京100191 [4]北京市机电产品标准质量监测中心,北京100027

出　　处：《计量学报》2018年第B12期11-15,共5页Acta Metrologica Sinica

基　　金：国家质检总局能力提升项目(ANL1804).

摘　　要：介绍了一种基于多光束干涉原理,采用双通道的微光程测量系统。该系统具有较高的测量灵敏度,可以实现诸如空气折射率变动引起光程微变的测量。采用简单方法对测量灵敏度实验进行验证,利用声波改变空气折射率进而改变光学光程,将系统的测试结果与迈克尔逊干涉方法的测试结果进行了比较,结果表明,本系统能够在较小干涉臂情况下实现只有当迈克尔逊干涉大干涉臂才能具备的测量灵敏度。由于光程变动的测量具有较多的应用,本测量实验系统具备微型化的结构特点,可以为相关领域的应用提供技术基础。A micro-optical path measurement system based on the principle of multi-beam interference using two channels is introduced. The system that can measure the micro-change of optical path caused by the change of air refractive index has high measurement sensitivity. And the measurement sensitivity can be verified by a simple experiment, which uses the acoustic wave to change the refractive index of the air and further change the optical path length. The experimental results of the system are compared with those of the Michelson interference method. It is concluded that this system can achieve high measurement sensitivity with small interference arm, while the Michelson interference system are in the case of the large interference arm. The measurement of the optical path variation can be applied in many fields, and the experimental system has the characteristics of miniaturization, which can provide the technical basis for the application in the related fields.

关 键 词：计量学 多光束干涉 光程微变动 激光波长 空气折射率 

分 类 号：TB92[一般工业技术—计量学]