一种超大量程激光万能测长机及其测量不确定度分析  

A Large-scale and Multi-functional Laser Measuring Machine and Uncertainty Analysis

作　　者：岩君芳 晏浩 杨伟敏 高鹏 刘鑫 YAN Jun-fang;YAN Hao;YANG Wei-min;GAO Peng;LIU Xin(Shanxi Province Institute of Metrology, Taiyuan, Shanxi 030032, China;The Key Metric Laboratory for Coal Industry of Shanxi Province, Taiyuan, Shanxi 030032, China;Zhiqi Railway Equipment Co., Ltd., Taiyuan, Shanxi 030032, China)

机构地区：[1]山西省计量科学研究院,山西太原030032 [2]煤基计量检测技术山西省重点实验室,山西太原030032 [3]智奇铁路设备有限公司,山西太原030032

出　　处：《计量学报》2018年第B12期58-61,共4页Acta Metrologica Sinica

基　　金：国家质量监督检验检疫总局科技计划项目(2013QK154);国家计量基标准资源共享平台项目(2017).

摘　　要：为进一步提高激光测长机的测量范围、测量精度及可靠性,满足装备制造产业等向大型化、高精度和可互换性方向迅速发展中对超长尺寸的计量要求,研制了一台超大量程激光万能测长机。采用花岗岩导轨做基座,激光干涉仪为标尺,设计符合阿贝原则的测轴,由气浮滑块支撑,并应用温度实时补偿技术,提高准确度和长期稳定性。对影响激光测长机测量准确度的误差进行了不确定度分析。实验结果表明,该激光测长机的测量范围达 26 m ,测量准确度达到0.3 μm+0.2×10 -6 L,k =2。To improve the range, accuracy and reliability of laser measuring machine, a laser measuring machine of large-scale and multi-functional was developed, which can meet the needs of large-scale, high-accuracy and interchangeability for equipment manufacturing industry. The system adopted granite guide as instrument base, interferometer as measuring datum accorded to Abbe principle in structure which was supported on some aerostatic slides. In addition, the measuring accuracy and stability were improved by means of the technology of temperature compensation.The error which affected laser measuring machine s accuracy was analyzed. The results show that, the range of laser measuring machine is (0~26) m, the uncertainty is 0.3 μm+0.2×10 -6 L, k =2.

关 键 词：计量学 超大量程 激光测长机 阿贝原则 

分 类 号：TB92[一般工业技术—计量学]