低转速下多弧离子镀制备的Mo-Ti-Al-N超晶格硬质涂层的微结构及背散射谱分析  

Analysis on Microstructure and Backscattering Spectroscopy of Superlattice Mo-Ti-Al-N Hard Coatings Prepared by Multi-arc Ion Plating at Low Rotation Speed

作　　者：王泽松 梁枫 项燕雄 李松权 田灿鑫 邹长伟 WANG Ze-song;LIANG Feng;XIANG Yan-xiong;LI Song-quan;TIAN Can-xin;ZOU Chang-wei(School of Physics and Technology, Lingnan Normal University, Zhanjiang 524048, China)

机构地区：[1]岭南师范学院物理科学与技术学院,广东湛江524048

出　　处：《表面技术》2019年第4期160-167,共8页Surface Technology

基　　金：广东省科技计划(对外合作)项目(2018A050506082);广东省自然科学基金(2018A030307027);岭南师范学院自然科学研究项目(LZL1809;1170916003)~~

摘　　要：目的研究低基片转速对纳米多层膜微结构和性能的影响。方法采用阴极多弧离子镀技术在单晶硅基片上沉积制备了MoTiAlN/MoN/Mo纳米复合结构涂层,借助X射线衍射仪(XRD)、扫描电镜(SEM)、透射电镜(TEM)、背散射谱(RBS)和纳米硬度计,分别对样品的物相、形貌、组分和硬度进行表征分析。结果 XRD显示不同转速下制备的涂层的物相结构主要为六角密排结构的Mo N和面心立方(Ti,Al)N,较高基片转速下涂层的结晶性较好。SEM和TEM图像证实,2 r/min基片转速下的目标涂层具有平均调制周期26 nm的Ti AlN/MoN超晶格结构,总厚度为1.15μm,且界面清晰。纳米显微硬度测试表明,低基片转速下,涂层硬度和杨氏模量分别达到(30±2)GPa和(500±30)GPa。结论不同能量的~7Li^(2+)离子卢瑟福背散射谱结合SIMNRA拟合程序,可定量评估该超晶格结构涂层的原子百分比、每个子层的物理厚度及调制周期,这为纳米多层膜的微结构表征提供了一种有效的分析手段。The work aims to study the impact of low substrate rotation speed on microstructure and physical properties of nanostructured multilayer. MoTiAlN/MoN/Mo composite coatings were deposited on silicon substrates by cathodic multi-arc ion plating, and the phase structure, morphology, component and nanohardness of coatings species were characterized by X-ray diffraction, scanning electron microscopy, transmission electron microscopy, Rutherford backscattering spectroscopy and nanohardness tester. XRD results indicated that the coatings deposited at various substrate rotation speeds comprised hcp-MoN and fcc-(Ti,Al)N phases and the crystallinity was better at higher substrate rotation speed. SEM and TEM images confirmed that the mean modulation period and total physical thickness of superlattice TiAlN/MoN coatings with a sharp interface deposited at 2 r/min were 26 nm and 1.15 μm, respectively and the interface was clear. The nanohardness and Young modulus were up to(30±2) GPa and(500±30) GPa, respectively. RBS along with SIMNRA program proves to be a good method to evaluate the atomic concentrations, physical thicknesses of individual sublayers as well as the modulation periods of superlattice coatings quantitatively and provide reliable characterization for nanomultilayers.

关 键 词：多弧离子镀 纳米多层膜 Mo-Ti-Al-N超晶格涂层 微结构 调制周期 背散射谱 

分 类 号：TG174.4[金属学及工艺—金属表面处理]