可编程熔融石英标准小电容的仿真研究  

Simulation study of a programmable fused silica small capacitance standard

作　　者：季晓玲[1] 杨雁[2] 贺青[2] 迟宗涛[1] LEE READUK Ji Xiaoling;Yang Yan;He Qing;Chi Zongtao;LEE READUK(College of Electronic Information, Qingdao University, Qingdao 266071, Shandong, China;National Institute of Metrology, Beijing 100029, China)

机构地区：[1]青岛大学电子信息学院,山东青岛266071 [2]中国计量科学研究院,北京100029

出　　处：《电测与仪表》2019年第8期36-40,共5页Electrical Measurement & Instrumentation

基　　金：国家自然科学基金资助项目(51377150);国家质量基础的共性研究与应用专项资助(2016 YFF0200105)

摘　　要：可编程标准电容器中小电容单元的电容值按线性比例变化是输出任意电容值的重要条件。小电容单元受到寄生电容的干扰,导致实际电容值与名义值误差较大,并且随着电容单元名义值减小,引入的相对误差值变大。文中利用有限元分析软件Ansoft Maxwell在静电场下对可编程电容器中小电容单元进行仿真,深入研究和分析了不同条件下寄生电容的影响并提出了改善措施,提出一种微小电容设计方案,通过仿真辅助实现了可编程熔融石英标准小电容单元的设计。In order to realize the accurate arbitrary capacitance output of the precision programmable fused silica capacitor, the output capacitance value of each capacitance unit must be changed by binary order. However, due to the influence of parasitic capacitance, the actual capacitance value is bigger than its nominal value, and the smaller the nominal value of the capacitance units, the greater the relative error. Based on finite element simulation using Ansoft Maxwell, the precision realization of small capacitance unit is studied in this paper. The impact of parasitic capacitance under different conditions is analyzed and the improved measures are put forward through simulation, and the design scheme of micro-capacitance is proposed. According to the simulation results, the design scheme of programmable fused silica small capacitance unit is presented and confirmed.

关 键 词：可编程电容器 寄生电容 ANSOFT MAXWELL 精密小电容 

分 类 号：TM933[电气工程—电力电子与电力传动]