基于石英增强光声光谱的痕量气体传感技术研究进展  

Research Progress of the Trace Gas Sensing Based on Quartz-enhanced Photoacoustic Spectroscopy

作　　者：佟瑶[1] 马欲飞 TONG Yao;MA Yu-fei(Harbin Institute of Technology,School of Aeronautics,Harbin 150001,China)

机构地区：[1]哈尔滨工业大学可调谐激光技术国家级重点实验室,黑龙江哈尔滨150001

出　　处：《聊城大学学报（自然科学版）》2019年第2期34-41,共8页Journal of Liaocheng University:Natural Science Edition

基　　金：国家自然科学基金(61505041;61875047);黑龙江省自然科学基金优秀青年项目(JJ2019YX0173)资助

摘　　要：石英增强光声光谱技术(QEPAS)作为一种高灵敏度的间接吸收光谱技术,目前已成为痕量气体检测领域的研究热点.本综述文章介绍了近几年具有代表性的QEPAS技术方案,从提高激光功率、增强声耦合效率以及传感器的实际应用三个角度,对比了新型结构的探测性能,分析了各结构的优势.最后,对本文中提到的QEPAS结构进行了总结,并对QEPAS技术未来的发展进行了展望.As a highly sensitive indirect absorption spectroscopy technique,quartz enhanced photoacoustic spectroscopy(QEPAS)has been a research hotspot in the field of trace gas detection.This review summarized the detection capability and the advantages of several representative sensor technology solutions based on QEPAS from the following three aspects of improving the laser output,enhancing the acoustic coupling efficiency and facilitating the practical application.Finally,the structure mentioned in the paper had been summarized and the development prospect of this kind technique is also predicted.

关 键 词：石英增强光声光谱 痕量气体检测 激光器 石英音叉 

分 类 号：TN217[电子电信—物理电子学] TN219