微立体光刻压电陶瓷的形变预测与补偿研究  

Geometric deformation prediction and compensation for micro-stereolithography of piezoceramic

作　　者：张园豪 陈韦岑 吴大伟[1] ZHANG Yuanhao;CHEN Weicen;WU Dawei(State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronauticsand Astronautics, Nanjing 210016, China)

机构地区：[1]南京航空航天大学机械结构力学及控制国家重点实验室,江苏南京210016

出　　处：《电子元件与材料》2019年第4期77-82,共6页Electronic Components And Materials

基　　金：国家自然科学基金面上项目(51675278);机械结构力学及控制国家重点实验室开放课题(MCMS-0317G01)

摘　　要：现有微立体光刻技术制备的压电陶瓷普遍存在密度小、性能低、几何精度难以精确控制等问题。本文通过设计陶瓷浆料各组分之间的成分比例,控制光固化参数和热处理工艺,建立几何形变的数学预测和补偿模型,制备了致密性高、形状复杂的压电陶瓷,提高了压电陶瓷在光固化、脱脂、烧结过程中的几何精度。实验表明:当压电陶瓷(PZT-5H)浆料质量分数为75%时,坯体烧结后的密度为7.35 g/cm^3;在2 kV/mm的极化电压下,压电常数d_(33)为600 pC/N,相对介电常数为2875,性能得到提升;经过几何形变补偿,压电陶瓷的几何精度可以提高80%。The piezoceramics prepared by micro-stereolithography technique have many problems, such as lessdensity, low performance and poor geometric accuracy. Through materials design and photo-curing parameters and heat treatment process controlling, the prediction and compensation models of geometric deformation during photo-curing, debinding and sintering processes was established, the piezoceramics with high density and complexity shape were manufactured. The results show that high-density 7. 35 g / cm ^3 is achieved when the mass fraction of piezoceramic ( PZT-5H) suspension is 75%. The piezoelectric constant d 33 is 600 pC / N and the relative dielectric constant is 2875 under the polarization voltage of 2 kV / mm. The properties of piezoceramic were significantly improved. After compensation, the geometrical accuracy of piezoceramic can be improved by 80%.

关 键 词：微立体光刻 压电陶瓷 几何精度 形变补偿 压电性能 

分 类 号：TM282[一般工业技术—材料科学与工程]