大量程高精度位移传感器自动校准技术研究  

Research on Wide Scale and High Accuracy Calibration Technology of Linear Displacement Sensor

作　　者：宋一罡 解岩 SONG Yigang;XIE Yan(AVIC The First Aircraft Institute,Xi'an 710089,China)

机构地区：[1]航空工业第一飞机设计研究院,西安710089

出　　处：《航空制造技术》2019年第8期93-97,共5页Aeronautical Manufacturing Technology

摘　　要：基于传统的位移传感器校准存在摩擦、空程等缺陷问题,提出了一种量程为0～3000mm高精度校准方案。该方案以激光干涉仪为基准,直线电机配合气浮导轨为驱动单元,创新型光栅实现闭环控制,使定位精度在3μm/m量级。位移传感器校准时,通过六个自由度的可调夹具,使位移传感器运动方向与标准测量方向在同一条直线上,可实现阿贝误差的最大化消除。尤其针对特殊的浮子式传感器校准,通过设计专用夹具配合支撑点消除变形的校准方式,解决了测杆在校准过程存在的形变难题。同时,校准装置不确定度的评定和验证,表明该校准方法可行有效。It is a big challenge for the traditional calibration to make friction and backlash, so a wide scale and high accuracy calibration technology of linear displacement sensor is proposed. Taking laser interferometer as the reference,linear motor and bearing sliders are the driving unit, the grating achieves closed-loop control, and the positioning accuracy is on the micron level. Meanwhile, by a six-degree-of-freedom adjustable fixture in the calibration process, the reference direction is aligned with the measurement direction to eliminate the Abbe error. Meanwhile, aiming at the special float type sensor, a special fixture is designed to eliminate the deformation with support points, which solves the deformation problem of the measuring rod in the calibration process. The evaluation and verification of the uncertainty show that the calibration method is feasible and effective.

关 键 词：大量程 高精度 位移传感器 校准 浮子式 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]