激光晶体生长炉高精度晶体称重装置设计  

Design of High Precision Crystal Weighing Device for Laser Crystal Growth Furnace

作　　者：左海涛[1] 纪文刚[1,2] 李建鸿 张睿平 ZUO Hai-tao;JI Wen-gang;LI Jian-hong;ZHANG Rui-ping(Department of Automation, Beijing Institute of Petrochemical Technology;College of Information Science and Technology, Beijing University of Chemical Technology)

机构地区：[1]北京石油化工学院自动化系 [2]北京化工大学信息科学与技术学院

出　　处：《化工机械》2019年第2期187-191,共5页Chemical Engineering & Machinery

摘　　要：针对激光晶体生长过程中晶体重量增长缓慢、现有称重装置精确度不高的问题,设计了一种用于激光晶体生长炉的高精度晶体称重装置。实测结果表明,该称重装置结构简单合理,机械结构的强度和刚度满足要求,与激光晶体生长炉适配性高,稳定性好,大幅提高了晶体称量精度。Considering slow growth of the laser crystal and the existing weighing device’s poor accuracy, a weighing device with high precision for the laser crystal growth furnace was developed. The actual measurement results show that, this weighing device has simple structure and its mechanical structure’s strength and rigidity can meet the requirements and can ensure the rationality of structural design. It has high adaptability with laser crystal growth furnace and high stability and it can greatly improve the accuracy of crystal weighing.

关 键 词：高精度称重装置 激光晶体生长炉 机械结构 有限元分析 控制系统 

分 类 号：TQ056.19[化学工程]