微电容超声换能器的前端专用集成电路设计  被引量:2

Design of Front-End Specific Integrated Circuit for Capacitive Micromachined Ultrasonic Transducers

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作  者:杜以恒 何常德[1] 张文栋[1] Du Yiheng;He Changde;Zhang Wendong(Key Laboratory of Instrumentation Science & Measurement, North University of China , Taiyuan 030051 , China)

机构地区:[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出  处:《半导体技术》2019年第4期251-256,共6页Semiconductor Technology

基  金:国家杰出青年科学基金项目(61525107);国家重点研发计划项目(2016YFC0105004);山西省"1331工程"重点学科建设计划

摘  要:针对微电容超声换能器(CMUT)微弱电流信号检测的要求,设计了一种用于CMUT的前端专用集成电路——运算放大器(OPA)电路。运算放大器电路采用两级放大结构,第一级采用全差分折叠-共源共栅结构,输出级采用AB类控制的轨到轨输出级,在运算放大器电路反相输入端和输出端通过一个反馈电阻实现CMUT电流信号到电压信号的转换。采用GlobalFoundries 0.18μm的标准CMOS工艺进行了仿真设计和流片,芯片尺寸为226μm×75μm。仿真结果表明,运算放大器的开环增益为62 dB,单位增益带宽为30 MHz,在3 MHz处的输入参考噪声电压为2.9μV/Hz^(1/2),电路采用±3.3 V供电,静态功耗为11 mW。测试结果表明仿真与实测结果相符,该运算放大器电路能够实现CMUT微弱电流信号检测功能。For the requirements of the detecting weak current signal of capacitive micromachined ultrasonic transducer(CMUT), an application special integrated circuit-operational amplifier(OPA) circuit for CMUT front-end was designed and fabricated. The proposed two-stage OPA circuit consisted of a full differential folded-cascode amplifier stage followed by a class AB rail-to-rail output stage. A feedback resistor was used between the inverting input and the output of the amplifier, which could convert the output current signal of the CMUT to a voltage signal. The OPA circuit was simulated and designed by GlobalFoundries 0.18 μm standard CMOS technology, and then it was taped out. The chip area is 226 μm×75 μm. The simulation results show that the open loop gain of the operational amplifier is 62 dB, the unity gain bandwidth is 30 MHz, and the input reference noise voltage is 2.9 μV/Hz1/2 at 3 MHz. And the static power consumption of the OPA circuit is 11 mW with a ±3.3 V power supply voltage. The test results show that the simulation results are in agreement with the experimental ones. The OPA circuit can realize the weak current signal detection function of CMUT.

关 键 词:专用集成电路(ASIC) 运算放大器(OPA) 微电容超声换能器(CMUT) 微弱电流信号 互补型金属氧化物半导体(CMOS) 

分 类 号:TN432[电子电信—微电子学与固体电子学]

 

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