掺杂CuO微纳米材料及其低温气敏性能的研究  

Metal Doping CuO based Nano/Micro Materials and Its Sensing Performance at Low Operating Temperature

作　　者：贺蒙 李思涵 胡校兵 解丽丽[1] 朱志刚[1] HE Meng;LI Sihan;HU Xiaobing;XIE Lili;ZHU Zhigang(School of Environmental and Materials Engineering,Shanghai Polytechnic University,Shanghai 201209,China)

机构地区：[1]上海第二工业大学环境与材料工程学院,上海201209

出　　处：《传感技术学报》2019年第4期508-513,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(61471233);上海第二工业大学研究生项目基金(EGD17YJ0033)

摘　　要：采用水浴加热法合成CuO微米颗粒,并用Au、Ag和Cr元素进行掺杂。通过扫描电镜和X射线衍射仪对产物的形貌及组成进行表征,并将合成的粉体制成敏感膜,采用静态配气法对产物气敏性能进行研究。实验结果表明:制备合成的CuO颗粒呈微米片聚合成的橄榄或捧花状,尺寸范围在2μm～3μm;所有样品的XRD图谱与标准卡片一致;微米CuO的气敏性能随着测试温度的降低而提高。气敏测试表明:掺杂1.25 wt%Au的CuO对10×10^(-6)的H_2S气敏性能最好,最佳工作温度降低至40℃,响应值达到128,具有良好的选择性;此外,该传感器的最低检测下限达到100×10^(-9),具有较好的重复性和长期稳定性,有望制备出低功耗H_2S气体传感器。CuO microparticles were synthesized by water-bath heating and doped with elements of Au,Ag and Cr. The morphology and composition of the product were characterized by scanning electron microscopy and X-ray diffractometry. The synthesized powder was made into a sensitive film. The gas-sensitivity of the product was investigated by static gas distribution method. The experimental results show that the prepared CuO particles are in the form of olives or bouquets of micro-sheets,ranging in size from 2 to 3 μm. The XRD patterns of all samples are the same as those of the standard cards. The gas sensitivity of micro CuO increases as the test temperature decreases. Gas sensitivity tests show that CuO doped with 1.25 wt% Au has the best gas sensitivity and good selectivity to 10×10^-6 H 2S. The best operating temperature is reduced to 40 ℃,at the same time the sensitivity reaches 103. In addition,the detected limition of the sensor is 100×10^-9 ,and it has good repeatability and long-term stability. It is expected to produce a low-power H 2S gas sensor.

关 键 词：气体传感器 氧化铜 贵金属 掺杂 

分 类 号：TQ138.11[化学工程—无机化工]