基于PDMS海绵介质层的电容式柔性压力传感器  

Capacitive Flexible Pressure Sensor Based on PDMS Sponge Dielectric Layer

作　　者：陈瞳 王瑞荣[1] 李晓红[1] CHEN Tong;WANG Ruirong;LI Xiaohong(Department of Electronic Engineering,Taiyuan Institute of Technology,Taiyuan 030008,China;Network Information Center,Taiyuan Institute of Technology,Taiyuan 030008,China)

机构地区：[1]太原工业学院电子工程系,太原030008 [2]太原工业学院网络信息中心,太原030008

出　　处：《传感技术学报》2019年第4期528-531,共4页Chinese Journal of Sensors and Actuators

摘　　要：柔性压力传感器以其低成本和大的检测范围等优势广泛的应用于电子皮肤和可穿戴传感器领域。本文通过在PDMS中填充碳酸氢铵材料,制备了大面积高密度具有微观结构的PDMS海绵介质层,通过简易的方法完成了柔性压力传感器的制备。与以往的柔性压力传感器相比,制备的PDMS海绵介质层由于气孔的存在更容易在受到压力时发生形变,拥有高的灵敏度(0.23 kPa^(-1))、大的检测范围(0～50 kPa)、稳定的重复性(>1 000循环)以及快的响应时间(<150 ms)。通过对不同厚度、不同大小的PDMS海绵介质层进行测试,利用厚度为1.5 mm,大小为8 mm×8 mm的PDMS海绵作为压力传感器的介质层实现了力的实时检测。Flexible pressure sensors are widely used in the fields of electronic skin and wearable sensors due to their advantages of low cost and large detection range. In this paper,a large-area high-density PDMS sponge as a dielectric layer was prepared by filling ammonium bicarbonate(NH 4HCO 3)material in the PDMS,and the preparation of flexible pressure sensor was completed by a simple method. Compared to previous pressure sensor,,the prepared PDMS sponge dielectric layer is more likely to deform under pressure due to the existence of air-pores. The flexible pressure sensor has high sensitivity(0.23 kPa^-1 ),large detection range(0~50 kPa),stable repeatability(>1 000 cycles),and fast response time(<150 ms). By testing the dielectric layer of PDMS sponge with different thickness and size,the pressure sensor can detect force in real-time using the PDMS sponge dielectric layer with thickness of 1.5 mm and size of 8 mm×8 mm.

关 键 词：柔性压力传感器 PDMS海绵 电容式 灵敏度 电子皮肤 

分 类 号：TN212.1[电子电信—物理电子学]