宽光谱高分辨率光谱分析系统设计  

Design of Wide-Spectrum High-Resolution Spectral Analysis System

作　　者：杜杉 张国玉[1] 韩欣欣 徐阳[2] 迟明波[2] 吴一辉[2] Du Shan;Zhang Guoyu;Han Xinxin;Xu Yang;Chi Mingbo;Wu Yihui(School of Optical Photoelectric Engineering,China Chaugckun University of Science and Technology,Changchun,Jilin 130022,China;State Key Laboratory of Applied Optics,China Changchun Institute of Optics,Fine Mechanics and Physics,Changchun,Jilin 130033,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033

出　　处：《激光与光电子学进展》2019年第8期246-252,共7页Laser & Optoelectronics Progress

基　　金：国家自然科学基金青年基金(61605198);吉林省科技发展计划项目优秀青年人才基金(20180520230JH)

摘　　要：结合光学像差理论和光栅色散原理,采用像元分辨率匹配方法,提出了一种宽光谱高分辨率光栅光谱仪初始结构设计方法。在综合考虑机械加工装调和光谱仪通光效率的基础上,将其应用于波长为200～1000nm、分辨率为0.01nm的Czerny-Turner型光栅光谱仪光学系统初始结构设计中。运用ZEMAX软件对光谱仪光学结构进行了仿真和优化,结果表明,该设计方法可以同时兼顾光谱探测范围、分辨率、通光孔径等各项设计要求,仪器设计性能均能满足各项指标要求。With the help of optical aberration theory,grating dispersion theory and pixel resolution matching theory,we design an initial structure of a wide-spectrum high-resolution grating spectrometer.Based on the comprehensive consideration of the mechanical processing and the efficiency of the spectrometer,this method is applied to the initial structural design of the optical system of a Czerny-Turner grating spectrometer with a wavelength range from200 nm to 1000 nm and a resolution of 0.01 nm.The ZEMAX software is used to simulate and optimize the optical structure of this spectrometer.The results show that this design method can simultaneously meet various design requirements such as spectral detection range,resolution and clear aperture,so that the instrument design performance can meet the requirements of various indicators.

关 键 词：光谱学 光栅光谱仪 初始结构 像元匹配 ZEMAX 

分 类 号：O439[机械工程—光学工程] O433.4[理学—光学]