基于图像灰度信息的直线位移测量  

Linear Displacement Measurement Based on Image Grayscale Information

作　　者：刘雪玲[1,2] 胡金春[1,2] 佟浩[1,2] 葛爱学 杜胜武[1,2] 朱煜[1,2] Liu Xueling;Hu Jinchun;Tong Hao;Ge Aixue;Du Shengwu;Zhu Yu(State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsingh ua University,Beijing 100084, China;Beijing Key Lab of Precision/Ultra-Prec is ion Manufacturbig Equipment and Control,Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China;Rocket Force Research Institute, Chinese People's Liberation Army, Beijing 100084, China)

机构地区：[1]清华大学机械工程系摩擦学国家重点实验室,北京100084 [2]清华大学机械工程系精密超精密制造装备及控制北京市重点实验室,北京100084 [3]中国人民解放军火箭军研究院,北京100084

出　　处：《光学学报》2019年第4期183-189,共7页Acta Optica Sinica

基　　金：国家自然科学基金(51175296;51677104);清华大学摩擦学国家重点实验室自由探索项目(SKLT2018C07)

摘　　要：提出了一种基于视觉的新型直线位移测量方法。建立了图像各像素点灰度值与直线运动位移间的映射函数模型,通过数值方法解算了直线运动平台的位移。通过蒙特卡罗仿真对所提方法进行分析,证明了其可行性与合理性。分析了检测点拓扑结构对测量精度的影响。实验结果表明,在10 mm的位移测量范围内,所提方法的测量误差标准差为4μm。A new vision-based method for measuring linear displacement is proposed. The model of mapping function between the gray value of each pixel and the linear motion displacement is established. The displacement of the linear motion platform is obtained by the numerical method. The Monte Carlo method is used to analyze and verify the feasibility and rationality of the proposed method. In addition, the influence of detection point topology on the measurement accuracy is analyzed. The experimental results show that the standard deviation of the measurement error is 4 μm when the measurement range is 10 mm.

关 键 词：机器视觉 视觉测量 位移测量 灰度与位移间的映射函数 非线性计算 

分 类 号：TH71[机械工程—测试计量技术及仪器]