氧化锌纳米棒紫外探测器的制备及性能  

Fabrication and performance of Zinc Oxide nanorods based photoconductive ultraviolet detectors

作　　者：商世广 蒋建朋 杜玉环 张永超 SHANG Shiguang;JIANG Jianpeng;DU Yuhuan;ZHANG Yongchao(School of Electronic Engineering, Xi'an University of Posts and Telecommunications, Xi'an 710121, China)

机构地区：[1]西安邮电大学电子工程学院,陕西西安710121

出　　处：《西安邮电大学学报》2019年第1期58-62,共5页Journal of Xi’an University of Posts and Telecommunications

基　　金：陕西省教育厅科学研究计划资助项目(16JK1693);西安邮电大学创新基金资助项目(CXJJ2017025)

摘　　要：应用磁控溅射技术、光刻技术和水热法在玻璃衬底上制备了氧化锌(ZnO)光电导型紫外探测器。利用扫描电子显微镜、X射线衍射仪和分光光度计等测试仪器对ZnO光电导型紫外探测器进行表征分析。实验结果表明,ZnO薄膜紫外探测器和ZnO纳米棒紫外探测器光电流分别为5.78mA和6.48mA;相比ZnO薄膜光电导型紫外探测器,ZnO纳米棒光电导型紫外探测器响应度提高了12.9%、灵敏度提高了14.5%,响应时间缩短了66.7%。ZnO photoconductive ultraviolet (UV) detectors are developed on glass substrates by magnetron sputtering, lithography and hydrothermal methods. The ZnO photoconductive UV detectors are characterized by scanning electron microscope, X-ray diffraction and UV-visible spectrophotometer. The experimental results show that the photocurrents of the ZnO thin film ultraviolet detector and the ZnO nanorod ultraviolet detector are 5.78 mA and 6.48 mA respectively . Compared with the ZnO thin film photoconductive ultraviolet detector, the ZnO nanorod photoconductive UV detector has improved response by 12.9%, sensitivity by 14.5%, and response time has reduced by 66.7%.

关 键 词：水热法 氧化锌纳米棒 叉指电极 紫外探测 

分 类 号：O482.7[理学—固体物理]