激光辅助电化学放电加工微通道的特性  

Characteristics of a Laser-Assisted Electrochemical Discharge Machining Micro-Channel

作　　者：曹增辉 张朝阳[1] 王瑞[2] 赵斗艳 朱帅杰 朱浩 Cao Zenghui;Zhang Zhaoyang;Wang Rui;Zhao Douyan;Zhu Shuaijie;Zhu Hao(Institute of Laser Technology , School of Mechanical Engineering , Jiangsu University, Zhenjiang 212013, China;National Laboratory for Vacuum Technology and Physics , Lanzhou Institute of Physics , Lanzhou 730000, China)

机构地区：[1]江苏大学机械工程学院激光技术研究所,镇江212013 [2]兰州空间技术物理研究所真空技术与物理国家重点实验室,兰州730000

出　　处：《微纳电子技术》2019年第6期480-485,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51675242;11504144);江苏省六大人才高峰项目(GDZB-019)

摘　　要：玻璃材料近年来被广泛应用于微电子机械系统(MEMS),对于玻璃材料的加工,电化学放电加工(ECDM)是一种被广泛运用的手段。针对目前的电化学放电加工存在热影响区和过切现象的问题,提出了一种激光辅助电化学放电加工玻璃的加工方法,阐述了其作用机理,设计了实验装置,并与传统电化学放电加工进行了微通道加工的对比实验。通过与传统电化学放电加工对比,发现激光辅助电化学放电的加工方式能明显减少放电加工过程中的热影响区和过切现象,故激光辅助有效改善了电化学放电在玻璃材料上加工微通道的质量和精度,在MEMS领域具有良好的应用前景。Glass materials have been widely used in micro-electromechanical systems(MEMS)in recent years.The electrochemical discharge machining(ECDM)is a widely used means to process glass materials.Aiming at the problems of the heat-affected zone and over-cutting phenomenon in current ECDM,a laser-assisted ECDM method for processing the glass was presented.Its processing mechanism was discussed,the experimental device was designed,and a contrasting experiment with the traditional ECDM for micro-channel processing was carried out.It is found that the laserassisted ECDM can significantly reduce the heat-affected zone and over-cutting phenomenon in the process of discharge machining.Therefore,the laser-assisted ECDM can effectively improve the quality and accuracy of micro-channel processing on glass materials,and has a good application prospect in the field of MEMS.

关 键 词：微电子机械系统(MEMS) 电化学放电加工(ECDM) 微通道 微细加工 玻璃 

分 类 号：TN249[电子电信—物理电子学] TH703[机械工程—仪器科学与技术]