散射型近场扫描光学显微镜的探针振动参数优化研究  

Parameter optimization of tip vibration in the scattering-type scanning near-field optical microscopy

作　　者：彭涛 朱亦鸣[1,2] 游冠军 PENG Tao;ZHU Yiming;YOU Guanjun(Shanghai Key Laboratory of Modern Optical System,University of Shanghai forScience and Technology,Shanghai 200093,China;School of Optical-Electrical and Computer Engineering,University of Shanghai forScience and Technology,Shanghai 200093,China)

机构地区：[1]上海理工大学上海市现代光学系统重点实验室,上海200093 [2]上海理工大学光电信息与计算机工程学院,上海200093

出　　处：《光学仪器》2019年第2期60-65,共6页Optical Instruments

基　　金：国家重点研发计划(2017YFF0106304,2016YFF0200306);上海高校青年东方学者岗位计划;上海市“科技创新行动计划”(15DZ0500100)

摘　　要：基于原子力显微镜平台设计了可见.近红外波段的散射型近场扫描光学显微镜,通过理论模型计算和实验测量,分析了散射探针振动的调制振幅和扫描反馈幅值对近场信号的影响。研究表明:与探针针尖尺寸相近的调制振幅有利于抑制背景散射噪声及优化近场信号的信噪比;当探针扫描反馈幅值与自由空间调制振幅之比大于90%时,可基本消除探针扫描过程中非简谐振动对近场成像测量的影响。In this paper, we present performance optimization for a home-built scattering-type scanning near-field optical microscope. We studied the influence of both the vibration amplitude and the amplitude setpoint of scattering tip on background suppression and near-field signal extraction. It’s demonstrated that the amplitude of small vibration similar to the size of tip climax is beneficial to suppress background related to far-field scattering from probe shaft and cantilever. In order to reduce the influence of vibration harmonics on signal demodulation during probe scanning, the ratio of feedback amplitude setpoint to free space vibration amplitude must be 90% at least.

关 键 词：散射型近场扫描光学显微镜 原子力显微镜 振动振幅 反馈幅值 

分 类 号：O433[机械工程—光学工程]