用于微电机系统的Co-Pt-P磁性薄膜的制备  

Preparation of Co-Pt-P Magnetic Films for Micromotor System

作　　者：孙鹏娇[1,2] SUN Pengjiao(Jilin Technology College of Electronic Information,Jilin 132021,China;Harbin University of Science and Technology. Harbin 150080,China)

机构地区：[1]吉林电子信息职业技术学院 [2]哈尔滨理工大学

出　　处：《电镀与环保》2019年第3期4-6,共3页Electroplating & Pollution Control

摘　　要：使用电沉积方法制备了用于微电机系统的Co-Pt-P磁性薄膜。研究了次磷酸钠的浓度对薄膜的沉积速率、厚度、成分、表面形貌及磁性能的影响。结果表明:提高次磷酸钠的浓度,有利于加快沉积速率,提高薄膜中钴和磷的质量分数。Co-Pt-P磁性薄膜是一种典型的瘤状颗粒膜。磷的析出有利于细化薄膜表面颗粒,限制畴壁位移,从而大大提高薄膜的矫顽力。然而,高浓度的次磷酸钠会破坏镀液的稳定性,使薄膜的磁性能下降。Co-Pt-P magnetic films for micromotor system were prepared by electrodeposition method.The influence of the concentration of sodium hypophosphite on the deposition rate,thickness,composition,surface morphology and magnetic property of the films were studied.The results showed that increasing the concentration of sodium hypophosphite was beneficial to accelerate the deposition rate and increase the mass fraction of cobalt and phosphorus in the films.Co-Pt-P magnetic films was a kind of typical nodular granular films.Phosphorus precipitation was beneficial to refine the particles on surface of the films and limit the domain wall movement,which greatly improve the coercivity of the films.However,high concentration of sodium hypophosphite would destroy the stability of the plating bath and decrease the magnetic property of the films.

关 键 词：Co-Pt-P磁性薄膜 电沉积 矫顽力 

分 类 号：TQ153[化学工程—电化学工业]