天光一号预放大器自动准直技术研究  

Study on Automatic Collimation Technology of Preamplifier for Heaven-Ⅰ

作　　者：李静 王钊 胡凤明 高智星 田宝贤 LI Jing;WANG Zhao;HU Fengming;GAO Zhixing;TIAN Baoxian(China Institute of Atomic Energy,P. O. Box 275-7,Beijing 102413,China)

机构地区：[1]中国原子能科学研究院核物理研究所

出　　处：《原子能科学技术》2019年第6期1112-1116,共5页Atomic Energy Science and Technology

基　　金：国家自然科学基金青年科学基金资助项目(11505299)

摘　　要：天光一号高功率KrF准分子激光装置采用光学角多路实现了六束激光的主振荡功率放大,其光路复杂,人工调节繁琐,指向精度难以保证,且激光波长为248nm,属于深紫外波段,无法采用常用的光束自动准直方法。为了保障六束激光聚焦叠加并稳定精准地照射到靶面上,需开展适合天光一号装置激光参数及光路特性的自动准直技术研究。本文以预放大器三束输入、输出光路为研究对象,探索适合天光一号装置的自动准直方法,建立了预放大器光路自动准直系统,实现了快速、高精度光束的调节,验证了自动准直方案的可行性,为天光一号KrF准分子激光装置实现全光路自动准直奠定了技术基础。The angular multiplexing technology is used in the Heaven-Ⅰhigh power KrF excimer laser facility to amplify the six short light pulses.The complex optical system results in wasting time and labor in the beam path adjusting and the high-precision manual adjustment is very difficult.Because of its deep UV wavelength of 248 nm,the automatic collimation technology commonly used is not suitable for the Heaven-Ⅰ.In order to satisfy the requirement of the laser-matter interaction experiment,a new automatic collimation technology suitable for the Heaven-Ⅰis necessary to be developed to improve the coincidence accuracy of the focal spot.In the paper,aiming at the three-beam propagation through the preamplifier,the automatic collimation technology suitable for Heaven-Ⅰwas studied and used in the three input and output laser beams of the preamplifier.The result shows that the automatic collimation system can realize the fast and high-precision adjustment,which sets up the technology foundation for automatic collimation of Heaven-Ⅰhigh power KrF excimer laser facility.

关 键 词：KRF准分子激光 自动准直 预放大器 

分 类 号：TN249[电子电信—物理电子学]