一种凸非球面反射镜的检验方法  

Test method of convex aspheric reflector mirror

作　　者：胡文琦[1] 叶璐[1] 张金平[1] 郑列华[1] HU Wenqi;YE Lu;ZHANG Jinping;ZHENG Liehua(Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China)

机构地区：[1]中国科学院上海技术物理研究所

出　　处：《量子电子学报》2019年第3期278-283,共6页Chinese Journal of Quantum Electronics

摘　　要：凸非球面的面形检测是光学检验中的一大难题,提出了一种利用半反半透凹面自准单透镜检验凸非球面反射镜的方法。单透镜由凸、凹两个球面构成,凹面为半反半透自准面,使经非球面反射的光线可沿原路返回,从而实现补偿检验。该方法具有结构简单、检测能力强、无中心遮拦等优点。基于三级像差理论推导了检验系统的初始结构计算公式,给出了不同凸非球面反射镜检验系统的关键参数关系曲线。以r03=2000 mm、e^2=-2.4的凸非球面反射镜为例,求解相应初始结构参数,利用Zemax软件优化得到了系统残余波像差小于0.05λ。设计和仿真结果表明所提出的半反半透凹面自准单透镜的检验方法有利于检验各类凸非球面反射镜。Convex aspheric mirror surface is a major problem in optical inspection.A method for testing a convex aspheric mirror is proposed by using concavity autocollomatic transflective lens.The transflective lens is composed’of a convex spherical surfaces and a concave one.The concave surface is autocollomatic semi-reverse half surface.With the autocollomatic semi-reverse half surface design,the wavefront can be compensated and reflected by the aspheric surface.The light can return along the original path to achieve compensation inspection.The method has the advantages of simple structure,strong detection capability and no center obstruction.Based on the third-order aberration theory,calculation formula of the initial structure of inspection system is deduced,and the key parameters of different convex aspheric mirror inspection systems are obtained.The detection optical path of a convex reflection aspherical surface r03=2000 mm,e^2=-2.4 is designed,and the initial structure parameters are optimized using Zemax software.Wavefront aberration of system is less than 0.05λ.The design and simulation results show that the proposed method for testing concavity autocollomatic transflective lens is very beneficial to the inspection of all kinds of convex aspherical mirrors.

关 键 词：几何光学 凸非球面反射镜检测 半反半透透镜 三级像差理论 光学系统设计 

分 类 号：O435.2[机械工程—光学工程]