一种利用半反半透透镜检验二次非球面的方法  

Test Method of conic aspheric surface with semi-transmitting lens

作　　者：赵鹏玮 叶璐[1] 胡文琦[1] 郑列华[1] ZHAO Pengwei;YE Lu;HU Wenqi;ZHENG Liehua(Department of Public Technology,Shanghai Institute of Technical Physics,Chinese Academy of Science,Shanghai 200083,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海技术物理研究所,上海200080 [2]中国科学院大学,北京100049

出　　处：《量子电子学报》2019年第3期284-288,共5页Chinese Journal of Quantum Electronics

摘　　要：将半反半透透镜应用于非球面检验。半反半透面和待检验面作为透镜的两个面,空间上相互靠近。半反半透面实现光线自准,同时也对波前进行补偿。这样,既消除了中心遮挡,又可以减小光学系统的尺寸,同时也增强了检验的能力。根据三级像差理论对这一方法进行了推导,进而给出了从待检面的参数得到检验系统参数的方法。根据这一方法设计了一个口径300 mm,焦距1200 mm凸反射镜的检验光路,通过光学设计软件ZEMAX进行优化,优化后系统的波像差小于1/(100λ),满足光学检验的要求。The semi-transmitting lens is used in the test of aspheric surface.The semi-transmitting surface and the surface under testing are close to each other in space as two surfaces of the lens.Retro-reflected surface can also compensate the aberrations.This testing can eliminate the obscuration,decrease the size of optical system and increase the ability of compensation.According to the third order aberration theory,a method to obtain the testing parameters of the surface under testing is given.An optical system to test a convex aspheric mirror with diameter of 300 mm and focus of 1200 mm is designed.After the optimization with ZEMAX,the wave front aberration of the testing system is lower than 1/(100λ),which meets the requirement of optical testing.

关 键 词：几何光学 非球面辅助光学系统设计 三级像差理论 无像差双焦点 半反半透非球面检验 

分 类 号：O435.2[机械工程—光学工程]