光网络中分光探测器薄膜的研制  

Fabrication of beam-splitting photodetector film in optical networks

作　　者：石澎[1] 毕君 张功 张于帅 王丽荣[1] SHI Peng;BI Jun;ZHANG gong;ZHANG Yushuai;WANG Lirong(Department of Optoelectronic Engineering,Zhongshan Torch Polytechnic,Zhongshan 528436,China;Guangzhou Research Institute of Optics-Mechanics-Electricity Technology ,Guangzhou,510663,China;School of Optics and Electric Engineering,Changchun University of Science and Technology,Changchun 130022,China)

机构地区：[1]中山火炬职业技术学院光电工程系,广东中山528436 [2]广州市光机电研究所,广东广州510663 [3]长春理工大学光电工程学院,吉林长春130022

出　　处：《量子电子学报》2019年第3期360-365,共6页Chinese Journal of Quantum Electronics

基　　金：国家自然科学基金,41676184;国家重点研发计划,2016YFC0200400~~

摘　　要：光通讯网络监控系统中的分光探测器用于检测光信号的流量,在通信和信号检测领域具有非常广泛的应用.为满足器件使用需求,采用离子束辅助沉积(Ion beam aided deposit,IBAD)技术,对在1260~1620 nm波长范围内透射、反射能量分光比为50:50的分光探测器薄膜进行了研制。主要分析并解决了镀膜材料光学常数计算的问题,通过建立误差函数,优化并降低镀膜材料光学常数计算的误差。在设计分光探测器薄膜时,通过增加虚设层来平滑光谱曲线,同时降低膜厚的敏感度,也降低了制备工艺的难度。制备的分光探测器薄膜在1260~1620 nm波长范围内透射、反射分光比小于50:50(±0.5%),满足分光探测器指标参数要求。Beam-splitting photodetectors in optical communication network monitoring systems are used to detect the flow of optical signals and have a large number of applications in the field of communication and signal detection.In order to meet the device usage requirements,a beam-splitting photodetector film is developed based on ion beam aided deposit(IB AD)technology.Its transmission and reflection energy splitting ration is 50:50 in the wavelength range of 1520~1620 nm.The optical constants of coating material are analyzed and calculated.By establishing the error function,the error of optical constant of coated material is optimized and reduced.In the design of beam-splitting photodetector film,the spectrum curve is smoothed by adding the dummy layer,and the sensitivity of the layer thickness is reduced.As a result,the difficulty of the preparation process is reduced.The transmittance and reflection splitting ration of the prepared beam-splitting photodetector film in the wavelength range 1260~1620 nm is less than 50:50(±0.5%),which meets the requirements of the parameters.

关 键 词：薄膜光学 分光探测器薄膜 虚设层 分光比 

分 类 号：O484[理学—固体物理]