基于创制加工式的超镜面平面研磨抛光工艺方法的研究  

Research on the method of ultra-mirror surface grinding and polishing based on creative machining

作　　者：陈文清 CHEN Wenqing(Tatsod Research Institute,Shenzhen Tatsod Technology Co.,Ltd.,Shengzhen 518172,CHN;Hongkong Tatsod Technology Co.,Ltd.,Hongkong 999077,CHN;Shenzhen Xinyi Precision Machine Technology Co.,Ltd.,Shengzhen 518172,CHN)

机构地区：[1]深圳市沓索科技有限公司沓索研究院 [2]香港沓索科技有限公司 [3]深圳市信一精机科技有限公司超精密加工实验室

出　　处：《制造技术与机床》2019年第6期46-51,共6页Manufacturing Technology & Machine Tool

摘　　要：以光学镜面模具平面工件为实验工件,从加工设备、原材料配制以及工艺精度成形原理等方面系统提出一种超镜面平面研磨抛光工艺方法,制定相应的工艺实施路线并进行评价。成功解决了研磨抛光过程的润滑和发热等问题,从而降低工件表面出现各种微细缺陷的概率,得到完美的镜面表面。此方法可以广泛应用与集成电路制造、医疗器械、汽车配件、数码配件、精密模具、航空航天等领域。In optical lens mold plane for experimental artifacts,from processing equipment,raw material preparation and technology principle of forming precision and so on system put forward a method of super mirror surface grinding polishing process make corresponding process implementation route and evaluation.The problem of lubrication and heating during grinding and polishing is solved successfully,so as to reduce the probability of various micro-defects on the workpiece surface and get the perfect mirror surface.This method can be widely used in integrated circuit manufacturing,medical equipment,auto parts,digital parts,precision molds,aerospace and other fields.

关 键 词：超镜面平面 研磨抛光工艺 光学镜面模具 创制加工 或然性 

分 类 号：TG7[金属学及工艺—刀具与模具]