微型电场传感器在工频电场测量中的应用研究  

Power-frequency Electric Field Measurement Using a Micromachined Electric Field Sensor

作　　者：仝杰 雷煜卿 刘国华 王鹤 金学明 杨鹏飞 彭春荣 TONG Jie;LEI Yuqing;LIU Guohua;WANG He;JIN Xueming;YANG Pengfei;PENG Chunrong(China Electric Power Research Institute,Co.,Ltd.,Beijing 100192,China;State Grid Key Laboratory of Power Industrial Chip Design and Analysis Technology,Beijing Smart-Chip Mircroelectronics Technology Co.,Ltd.,Beijing 100192,China;Beijing Engineering Research Center of High-reliability IC with Power Industrial Grade,Beijing Smart-Chip Microelectronics Tchnology Co.,Ltd.,Beijing 100192,China;Beijing TFlying Transducer Technology Co.,Ltd.,Beijing 100083,China)

机构地区：[1]中国电力科学研究院有限公司,北京100192 [2]北京智芯微电子科技有限公司电力芯片设计分析实验室,北京100192 [3]北京智芯微电子科技有限公司北京市电力高可靠性集成电路设计工程技术研究中心,北京100192 [4]北京中科飞龙传感技术有限责任公司,北京100083

出　　处：《电子工程学院学报》2019年第5期67-72,共6页Journal of The College of Electronic Engineering

基　　金：国家发展改革委物联网技术研发及产业化专项(发改办高技〔2012〕2766号);国家电网公司总部科技项目(SGJSDK00ZPJS1600203).

摘　　要：该文基于高性能的MEMS电场敏感芯片研制出一种新型的工频电场测量系统。针对芯片调制被测电场后其输出信号的特征,采用正交相关检测原理提出一种可抑制背景干扰噪声的工频电场解调算法,设计出小型化、空间分辨力高的工频电场测量探头,并在基础上提出MEMS工频电场测量系统的系统级设计方案,成功实现了MEMS电场敏感芯片输出信号的无线采集、滤波、以及电场信号的高精度解调。高压输电线路下工频电场测量结果表明,MEMS工频电场测量系统与传统电场测量仪的测量结果具有良好的一致性。A novel power frequency electric field measurement system based on high-performance MEMS electric field sensing chips is developed. Based on cross-correlation detection principle, a power frequency electric field demodulation algorithm of MEMS sensing chips that can inhibit background interference noise is proposed. And a small-scale, high-resolution electric field measuring probe is designed. Moreover, the system overall structure scheme is designed for implementation of high-accuracy demodulation electric field signals. The test result under power lines shows that the plotted curves of the developed MEMS system are consistent with Narda EFA-300.

关 键 词：电场传感器 工频电场 正交相关检测 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]