压阻式柔性压力传感器的研究进展  

Progress in the research of piezo-resistive flexible pressure sensor

作　　者：于江涛 孙雷[1] 肖瑶[1] 蒋书文[1] 张万里[1] YU Jiangtao;SUN Lei;XIAO Yao;JIANG Shunwen;ZHANG Wanli(School of Electronic Science and Engineering,State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 611731,China)

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室电子科学与工程学院

出　　处：《电子元件与材料》2019年第6期1-11,共11页Electronic Components And Materials

基　　金：国家自然科学基金(50972024)

摘　　要：随着智能化技术及物联网的不断发展,柔性压力传感器作为可穿戴电子设备和电子皮肤的核心器件,拥有了越来越广阔的市场。经过了十余年的发展,压阻式柔性压力传感器的相关研究已经从探究具有压敏效应的导电高分子复合材料发展到了对高性能传感器的制备研究。为了获得高性能的柔性压力传感器,研究者们在传感器的材料、结构及器件设计等方面进行一系列的创新型研究工作。目前已经研制出了一些基于新型材料与结构的高性能、低成本的柔性压力传感器,并且在可穿戴传感器、电子皮肤等应用领域已经获得了一定程度的发展。本文综述了近年来压阻式柔性压力传感器在材料、结构及应用方向的创新及发展,并对该类传感器的发展进行了展望。With the developments of the intelligent technology and the internet of things(IoT), the flexible pressure sensors have a broader market as the core components of wearable electronic device and electronic skin(E-skin). The research of piezo-resistive flexible pressure sensors had developed from exploring conductive polymer materials with piezo-resistive performance to fabricating flexible pressure sensor with high performance. Some innovative researches were conducted in the material, structure and device design of the sensor to obtain high performance flexible pressure sensor. Up to now, some high-performance, low-cost flexible pressure sensors based on new materials and structures have been developed, and the developments of these sensors have been made in wearable sensors, electronic skin and other applications. In this paper, the innovation and development of piezo-resistive flexible pressure sensors in materials, structures and applications in recent years are reviewed, and the prospect of the research developments in piezo-resistive flexible pressure sensors are discussed.

关 键 词：智能化技术 物联网 综述 可穿戴电子设备 柔性压力传感器 电子皮肤 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]