基于纳米压痕技术的光子晶体薄膜实验研究与有限元模拟  

Simulation of Nanoindentation Experiments of Photonic Crystals Thin Films Using Finite Element Method

作　　者：王月敏[1] 商磊 闫相桥[1] 李新刚[2] 李垚[1] WANG Yuemin;SHANG Lei;YAN Xiangqiao;LI Xingang;LI Yao(Center for Composite Materials and Structures,Harbin Institute of Technology,Harbin 150000;China Construction Fourth Engineering Division Co.,Ltd.,Guangzhou 510000)

机构地区：[1]哈尔滨工业大学复合材料与结构研究所,哈尔滨150000 [2]中国建筑第四工程局有限公司,广州510000

出　　处：《材料导报》2019年第14期2283-2286,共4页Materials Reports

基　　金：国家自然科学基金(51572058;91216123)~~

摘　　要：采用垂直沉积自组装法制备了粒径为180nm的SiO2光子晶体薄膜,利用纳米压痕技术对其进行力学测试,采用ABAQUS软件对纳米压痕过程进行了仿真研究。结果表明:制备的光子晶体薄膜粒径均一且排列有序,弹性模量为7.79GPa,硬度为0.181GPa。有限元仿真的位移-荷载曲线与实验测试曲线保持一致,验证了仿真模型的正确性。通过对不同压入位置的模拟,发现薄膜的硬度和弹性模量随着压痕点从球形顶点过渡到微球中间时有增加的趋势。利用纳米压痕过程的能量分布,分析了压头下能量分布机理及不同压入位置力学参数不同的原因。The photonic crystals thin films have been prepared for the investigation of their deformation behaviors by nanoindentation tests at the sub-microscale.The process of nanoindentation test was simulated by ABAQUS software.The results indicate that the prepared photonic crystals thin films is highly ordered and arranged closely,and the measured elastic modulus is 7.79 GPa and the hardness is 0.181 GPa.Through the simulation of the different indenting positions,it is concluded that both the hardness and the elastic modulus increase slightly with the transition of the indentation point from the spherical surface crown to the middle position of the two microspheres,but the average error can be ignored and points out the reasons of the errors via the energy distribution.The simulation curve is basically consistent with the experimental load-displacement curve so that it can effectively simulate the mechanical test of the photonic crystals material,thus laying the foundation for the further research.

关 键 词：光子晶体薄膜 纳米压痕 有限元模拟 能量法 压入位置 

分 类 号：O341[理学—固体力学]