xBiInO3-（1-x）PbTiO3薄膜的横向压电特性  

Transverse Piezoelectric Properties of xBiInO3-（1-x）PbTiO3 Thin Films

作　　者：孙科学[1,2] 常月欣 成谢锋 SUN Kexue;CHANG Yuexin;CHENG Xiefeng(College of Electronic and Optical Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023;Jiangsu Province Engineering Laboratory of RF Integration & Micropackage,Nanjing 210023)

机构地区：[1]南京邮电大学电子与光学工程学院,南京210023 [2]江苏省射频集成与微组装工程实验室,南京210023

出　　处：《材料导报》2019年第14期2299-2304,共6页Materials Reports

基　　金：国家自然科学基金(11304160);南京邮电大学自然科学基金(NY215111)~~

摘　　要：近年来,压电薄膜在表面声波及压电器件等领域的应用得到了广泛关注和研究。有效横向压电系数(e31,f)是压电薄膜材料的一个重要性能指标,本工作重点研究xBiInO3-(1-x)PbTiO3薄膜的有效横向压电系数。在优化xBiInO3-(1-x)PbTiO3薄膜的基础上,通过多层悬臂梁研究xBiInO3-(1-x)PbTiO3薄膜的有效横向压电系数,当压电薄膜悬臂梁在交变电压作用下产生弯曲振动时,利用激光多普勒测振仪测量多层悬臂梁自由端的振动振幅,并根据悬臂梁法评估横向压电系数的基本原理,计算薄膜的有效横向压电系数,进而研究xBiInO3-(1-x)PbTiO3薄膜的横向压电性能。通过调控La的掺量,可优化压电薄膜的性能。In recent years,the application of piezoelectric films in surface acoustic waves and piezoelectric devices has received extensive attention and research.This paper focuses on the transverse piezoelectric properties of La doping x BiInO 3-(1-x)PbTiO 3 thin films.The effective transverse piezoelectricities of x BiInO 3-(1-x)PbTiO 3 films were studied experimentally by multilayer cantilevers.Under the applied sinusoidal voltage,the tip vibration amplitudes of the x BiInO 3-(1-x)PbTiO 3 multilayer cantilevers were measured experimentally by laser Doppler vibrometer,and the effective transverse piezoelectric coefficients of the films with different x and La doping can be evaluated according to the theory of Euler-Bernoulli cantilever and piezoelectric equations.Therefore,the optimized properties of the films can be obtained by properly controlling La doping contents.

关 键 词：射频磁控溅射沉积 薄膜 有效横向压电特性 悬臂梁 

分 类 号：TB34[一般工业技术—材料科学与工程] TB79